Used EATON NOVA / AXCELIS Lot of spare parts #9288538 for sale
URL successfully copied!
ID: 9288538
Qty / Part number / Description
(1) / 34214320001 / Power supply, arc discharge
(1) / 3850-0371-0001 / Controller, pirani gauge TM220
(2) / 17B5814 / Screws, filament mounting
(2) / 17189140 / Nuts, plate moly
(20) / 4001167 / Springs, retaining rod inconel
(2) / 17242340 / Gaskets, moly cup
(1) / 17249700 / Tube, ring plasma shower
(2) / 17135960 / Liners, shower tube
(2) / 17242360 / Covers, base graphite
(6) / 17269300 / Sleeves, insulating
(4) / 17269310 / Sleeves, insulating
(2) / 1906900 / Bellows, small, wafer holder
(1) / 0342-0648-3001R / Column, ACCEL
(4) / 1500-00165 / Belts, timing
(1) / 1174090 / Disk, gsd, for 5 wafers
(200) / 697300066203 / Screws, skthd cap, ss, vented, 6-32 x 3/8 / 6-32 x .3750 / Stainless steel
(10) / 311100040001 / Insulators, filament for skm sources
(6) / 311100050001 / Insulator, outer electrode for skm sources
(4) / 311300150001 / Insulators, inner electrode for skm sources
(1) / 155000170001 / Plate, arc chamber, top for skm sources
(16) / 669200830001 / Rings, retainer clip composed of tungsten
(1) / 1162710 / Arm, output, chuck assy 100 and 125mm / For 125mm wafers / High current implanters
(2) / 90500231 / O-rings, silicone, arp-06-165 / 6.487 id x .103 w
(1) / 763100010002 / Tube, ion gauge
(10) / 84300072001 / Caps, arc chamber end cap
(18) / 7230-0003-0014 / Insulators, porcelain
(3) / 85400010001 / Cartridges, bion, ion exchange products
(4) / 89600054001 / Chambers, arc source for NV3206 ion implanter
(2) / 34203841001 / Feeds thru
(2) / 728500020001 / Switches, atmosphere
(11) / 100300050004 / Connectors, socket
(10) / 100300060004 / Connectors, pin
(1) / 0298-0128-0001 / Arm, chamber load for EATON medium current implanter
(1) / 29801290001 / Arm, chamber unload for EATON medium current implanter
(1) / 110006024 / Arm, load/unload pivot for EATON medium current implanter
(15) / 7103-0036-3001 / Liners, magnet chamber inside upstream
(1) / 7103-0041-4002 / Liner, magnet chamber outside radius
(1) / 3110-0030-0001 / Insulator, suppressor
(4) / 6400265 / Rectifiers, diode
(33) / 17032830 / Bushings, insulator, enhanced sce
(3) / 1789810 / Plates, end 2 hole arc chamber
(6) / 1900400 / Filaments, electron shower 19 flat
(1) / 3300008 / Gauge, vacuum t/c 6343/004 (black top)
(12) / 3500243 / O-rings, belt, arp-026, polyurethane / 1-1/4 x 1-3/8 x 1/16 , 70 durometer / manuf p/n: -026 polyurethane
(6) / 3500241 / O-rings, belt, arp-028, polyurethane / 1-3/8 x 1-1/2 x 1/16 , 70 durometer / manuf p/n: -028 polyurethane
(10) / 3500242 / O-rings, belt, arp-045, polyurethane / 4 x 4-1/8 x 1/16 , 70 durometer / manuf p/n: -045 polyurethane
(2) / 3500239 / O-rings, belt, arp-044, polyurethane / 3-3/4 id x 3-7/8 od x 1/16 w, 70 duro
(2) / 1717480 / Plates, arc chamber top
(5) / 34202564001 / Boards, source terminal data link
(42) / 3110-0015-2001 / Insulators, filament source
(1) / 3300002 / Tube, ion - hcig nonex
(4) / 3100-0012-0001 / Inserts, emissive
(8) / 34203693001 / Filaments, buss.
There are no reviews yet