Used GASONICS / NOVELLUS Spare Parts for Aura 2000 #9105059 for sale
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ID: 9105059
Lot:
(3) Vac arm PCB
(3) Pca, loadlock, interface BD 90-2608
(1) Controller board 90-2658
(4) Plasma lamp failure detection A90-031-03
(4) Dual setpoint scr controller 90-2736
(1) Display decoder 90-2609
(5) Arm controller board 06764-802
(4) 48v control board 810-2140-005A
(7) Chambers AO1-132-01
(3) Power gauge.
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