Used HITACHI Spare parts for M-511 #9316644 for sale
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ID: 9316644
Qty / Part number / Description
(1) / 3-90656-*C / Encoder for M511 Mapping
(1) / 2-815886-01 / Pirani switch
(1) / SFC480CMO-4V4C2 / MFC HBR 300 SCCM
(1) / SFC480EMC-4VPE / MFC SF6 300 SCCM
(1) / SFC480MC-4VPN / MFC BCL3 100 SCCM
(1) / 1-818163-A / Robot hand, 8"
(1) / 3-848484**A (2-820977-05）/ Flow meter
(1) / 3-848474**A (2-820957-02) / Flow meter
(3) / 3-839668-01 / Back lights for LL10SAT
(1) / 600196 S3-85139-*A / M511 Mapping sensor (Optoelectronic switch)
(1) / 500-088A / QUARTZ Plate (E/T)
(2) / 3-838425-02 / QUARTZ Rings
(1) / 2-818225-01(S280876) / Shower Plate
(2) / 3-832525010 / O-Rings Perfluor G-65 Black (2BL model valve case)
(2) / 3-832776001 / O-Rings Per furo AS-280 White
(5) / 3-832776002 / O-Rings Superior F850 AS-381 White (AT Ring gate)
(5) / 3-832776004 / O-Rings Superior F850 AS-384 White (ET Ring gate)
(2) / 3-837424007 / O-Rings VITON AS-385 Black
(2) / 3-832776-01 / O-Rings AS-280(W) M511 Shower plate for lower part
(2) / 3-854521-B / Cooling fans for M511
(2) / HT-90 / Galdens
(1) / AS2051F-06 / Speed controller SMC
(2) / AS2051F-08 / Speed controllers SMC
(3) / AS3201F-03-06SN / Speed controllers SMC
(3) / AS3201F-03-08SN / Speed controllers SMC.
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