Used LAM RESEARCH Lot of spare parts for Autoetch #9285374 for sale
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ID: 9285374
Qty / Part Number / Description
(11) / 715-000102-001 / Pins
(14) / 715-002793-001 / Threaded rods
(2) / 853-007526F001 / Gate drive cylinders (Inner)
(1) / 715-007469-001 / Lower electrode, 8"
(10) / 715-008067-001 / Airlock doors
(2) / 715-008369-001 / 4-Pin wafer lifts
(2) / 853-004109-001 / Exit points
(3) / 853-006613-001 / Bulkhead exit points
(1) / 716-006446-001 / Cathode diffuser
(2) / 716-006711-001 / Graphite cathodes
(55) / 739-000421-001 / Teflon seals
(199) / 739-000422-001 / Teflon seals
(235) / 739-000983-001 / Teflon seals
(71) / 739-000984-001 / Teflon seals
(80) / 739-000985-001 / Teflon seals
(43) / 746-000218-001 / Bearings
(12) / 746-000219-001 / Bearings
(33) / 746-000220-001 / Bearings
(37) / 746-001125-001 / Thrust bearings
(39) / 746-001687-001 / Bearings
(1) / 766-000433-002 / Electronic valve
(1) / 768-001063-003 / Vacuum switch, 724 torr
(1) / 768-001063-001 / Vacuum switch, 50 torr
(1) / 768-006970-001 / Vacuum switch, 724 torr
(4) / 795-001776-001 / Optical filters
(1) / 795-002374-001 / Optical filter
(3) / 795-002627-001 / Optical filters
(4) / 795-006374-001 / Optical filters
(1) / 795-009202-001 / Optical filter
(3) / 795-009310-001 / Optical filters
(1) / 795-009374-001 / Optical filter
(2) / 795-009386-001 / Optical filters
(5) / 810-000392-001 / Serial I/O PC Boards
(3) / 810-000392F001 / PCB Assy boards
(1) / 810-000392R001 / PCB Assy board
(2) / 853-001142F001 / Assy match controls
(1) / 810-000667R001 / PCB TCG Interface
(1) / 810-000668R001 / -
(6) / 810-000670-001 / Analog output PCB
(3) / 810-000670R001 / -
(4) / 810-001314-001 / Digital I/O PCB
(7) / 810-001314F002 / I/O Boards
(5) / 810-001314-003 / Digital I/O PCB
(3) / 810-001314F003 / PWB Printed wiring boards
(3) / 810-001314R003 / PWB Printed wiring boards
(2) / 810-001316-002 / CPU 7803 PCB Boards
(4) / 810-001316F002 / PCB CPU Boards
(3) / 810-001316R002 / PCB CPU Boards
(3) / 810-001317-001 / Analog input PCB Boards
(1) / 810-001317F001 / PCB-AMT ADC Board
(2) / 810-001317R001 / PCB-AMT ADC Boards
(2) / 810-001984F002 / PCB, matrix, CRT drives
(1) / 810-004092R003 / PCB RF GEN interface
(1) / 810-004115F002 / PCB ES Memory card
(3) / 810-004115R002 / PCB ES Memory cards
(1) / 810-007215R001 / PCB Power driver
(3) / 810-007930F001 / PCB Gap driver boards
(5) / 810-007930R001 / PCB Gap driver boards
(1) / 810-009281R001 / PCB Gap driver board
(3) / 853-000577F001 / Phase and mag detectors
(2) / 853-001291F001 / -
(3) / 853-009300R001 / Gap driver assemblies
(10) / 853-001983F005 / End point detector assemblies
(1) / 853-002751F002 / Power supply assy
(7) / 853-005684R001 / Recipe modules
(2) / 853-007526F002 / Inner cylinders
(2) / 853-001372-001 / RTD Temperature sensors.
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