Used LAM RESEARCH / ONTRAK Lot of spare parts #9237009 for sale
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ID: 9237009
Qty / P/N / Part description
(3) / 2800303 / PCB-vme A/D card xycom xvme
(2) / 2800304 / PCB-vme D/A card xycom xv (a)
(1) / 121333000 / Robot, dry, assy
(1) / 122681100 / Upper head loader module assy
(1) / 122681100 / Upper head loader module assy
(1) / 212847300 / Harn,fefa, interconnect box
(4) / 0952-0173-0001 / Clamp, beam width, slit
(1) / 10-8886-063 / Assy disp, hpd, br#1, hf
(1) / 10-8886-064 / Assy disp,hpd brush #2 hf
(2) / 11094-101-D-5051 / Monochromator / detector, .2 meter
(1) / 15130-2-R-1410307 / RF match
(5) / 31-0013-001 / Snolid valve assy
(1) / 505-017500-353 / Pkng,chas,mon 14,gf
(1) / 600-10359-101 / PCB, cpu
(37) / 660-093827-001 / Power supply, 600w,2,3,4,12,15vdc
(8) / 684-097325-008 / Ca,tmp,out put,8ft
(2) / 685-097389-001 / Pump, turbo, 2000 lps, ser, tgm
(1) / 713-028553-002 / Ring, confinement, vespel
(5) / 713-043116-001 / Ring, shroud alliance
(1) / 713-043116-001 / Ring, shroud alliance
(2) / 714-460562-002 / Cover, elctd hsg esc
(3) / 715-00131-001 / Housing temperature control
(1) / 715-011005-001 / Housing-gap adjust
(17) / 715-0725-001 / Cathode anodized
(10) / 715-0725-001 / Cathode anodized
(12) / 715-080554-001 / Pl,mt,u,esc,asiq/384t
(6) / 715-140350-010 / Lower electrode cap
(4) / 715-140421-026 / Electrode aluminum 6"
(2) / 715-330164-006 / Adjustment plate
(1) / 715-460552-002 / Liner, chamber lower 9100/a6
(1) / 715-460553-002 / Liner, chamber upper 9100/a6
(1) / 715-460553-002 / Liner, chamber upper 9100/a6
(2) / 716-003773-001 / Ring, wap4 twist-n-lok
(1) / 716-011830-008 / Ring, focus (alumina) 8" wafer clamp
(1) / 716-011963-003 / Plate, clamp attachment
(4) / 716-020905-001 / Ring, filler, bottom, clamp
(4) / 716-020905-001 / Ring, filler, bottom, clamp
(2) / 716-020923-002 / Ring lam collimating 6-1d
(4) / 716-028123-002 / Clamp
(4) / 716-028123-002 / Clamp
(2) / 716-028123-002 / Clamp
(1) / 716-028414-018 / Ring, focus
(4) / 716-028605-402 / Confinement ring
(10) / 716-028688-281 / Plate, lwr wafer clamp, 8" shadow
(46) / 716-028688-581 / Clamp,wafer,shadow nose
(1) / 716-028721-262 / Clamp, shadow, ceramic
(3) / 716-028739-001 / Ceramic sleeve
(2) / 716-11505-001 / Diffuser cathode, 8"
(4) / 716-140349-010 / Focus ring 8"
(4) / 716-330004-008 / Ring,focus,hi-cond,esc,8"
(4) / 716-330004-008 / Ring,focus,hi-cond,esc,8"
(2) / 716-330122-002 / Plate top ceramic
(1) / 716-330122-002 / Plate top ceramic
(1) / 716-330122-002 / Plate top ceramic
(1) / 716-330167-188 / Ring,clamp,bot,actr,1.5,8"jeida
(2) / 716-440054-109 / Plate, focus ring adaptor cera
(8) / 716-440345-281 / Clamp,ceramic,wafer,shadow
(3) / 716-443083-004 / Ring qtz upper confine cip big holes
(1) / 716-460785-007 / Plate, cool gdp 10 hole
(1) / 716-800951-001 / Base, focus ring 200mm
(1) / 716-800951-001 / Base, focus ring 200mm
(2) / 716-801451-112 / Baffle,chbr,2300 mw stripper,a
(1) / 766-061763-001 / Valve, bellows
(1) / 766-092079-601 / Gt mech dry brg compl
(2) / 768-095454-001 / Actuator, position
(1) / 778-091827-502 / Cont,temp,w/halbd,rtd/ch5
(1) / 796-090807-001 / Gate valve assy
(1) / 796-093088-004 / Controller,adapt pressure vlv
(2) / 796-093088-004 / Controller,adapt pressure vlv
(2) / 799-110332-001 / Indx,smif,150mm,send
(1) / 799-550644-001 / Dr,assy,blws,tpi,vce 6
(1) / 799-901177-001 / Lpm, smif, 200mm
(2) / 799-901177-002 / Lpm, smif, 200mm
(2) / 810-017013-001 / PCB, amp interlock
(1) / 810-017013-001 / PCB, amp interlock
(1) / 810-017013-001 / PCB, amp interlock
(2) / 810-017018-002 / Assy,PCB,gap motor controller
(1) / 810-017018-002 / Assy,PCB,gap motor controller
(3) / 810-017018-002 / Assy,PCB,gap motor controller
(1) / 810-017030-005 / Assy PCB, gas panel
(1) / 810-017035-001 / PCB, sasi assy
(1) / 810-017035-001 / PCB, sasi assy
(1) / 810-017038-002 / PCB, serial i/o-2
(1) / 810-0503-001 / PCB, control RF match
(2) / 810-0530-001 / PCB, driver motor
(1) / 810-1314-1 / PCB, digital i/o
(1) / 810-17002-003 / PCB, i/o breakout assy
(1) / 810-1984-001 / PCB, driver matrix-crt
(1) / 810-490656-001 / Assy, PCB alli pm breakout
(5) / 839-013874-001 / Manifold,weldment, oxe
(2) / 839-013874-001 / Manifold,weldment, oxe
(1) / 839-024326-100 / Gas line
(1) / 839-024447-100 / Weldment, he v ac line, hi condt
(1) / 839-140210-001 / Assy cvr esc rb oxd
(1) / 839-360247-002 / Assy,rghg byp,univ,htd
(1) / 839-5010502-100 / Esc plasma coat
(1) / 852-11060-002 / Assy housing upper reac cham
(1) / 853-000358-001 / Crt housing
(1) / 853-001154-006 / Asm exit arm 3" 490
(1) / 853-008389-002 / Lifter anode assy
(2) / 853-011094-101 / Assy. monochromator,model,ep200,mmd
(9) / 853-011094-101 / Assy. monochromator,model,ep200,mmd
(5) / 853-011094-101 / Assy. monochromator,model,ep200,mmd
(2) / 853-012123-001 / Drive harmonic arm assy thor conn
(2) / 853-012123-001 / Drive harmonic arm assy thor conn
(1) / 853-012123-001 / Drive harmonic arm assy thor conn
(2) / 853-012123-001 / Drive harmonic arm assy thor conn
(6) / 853-012123-001 / Drive harmonic arm assy thor conn
(8) / 853-012123-001 / Drive harmonic arm assy thor conn
(1) / 853-012123-001 / Drive harmonic arm assy thor conn
(2) / 853-012123-001 / Drive harmonic arm assy thor conn
(1) / 853-012123-500 / Drive harmonic arm
(4) / 853-012200-002 / Assy, gate drive inner
(2) / 853-012200-002 / Assy, gate drive inner
(1) / 853-012550-001 / Wafer shuttle asm
(2) / 853-012600-101 / Assy, index send
(2) / 853-013540-002 / Manifold,heated,4400
(2) / 853-013541-002 / Assy, throttle valve
(2) / 853-013541-002 / Assy, throttle valve
(4) / 853-013542-002 / Assy, iso valve htd
(4) / 853-013542-002 / Assy, iso valve htd
(2) / 853-015130-002 / Match assy, lower
(1) / 853-015130-002 / Match assy, lower
(8) / 853-015130-002 / Match assy, lower
(3) / 853-015130-002 / Match assy, lower
(1) / 853-015130-002 / Match assy, lower
(1) / 853-015130-002 / Match assy, lower
(1) / 853-015130-002 / Match assy, lower
(1) / 853-015130-003 / RF match gear driven
(1) / 853-015130-103 / Assy match RF
(1) / 853-015130-503 / Assy, match, RF
(1) / 853-017415-001 / Cable, upper RF match d-s
(1) / 853-017818-020 / Assy, cable
(1) / 853-031685-001 / Match assy, main TCP
(1) / 853-031685-001 / Match assy, main TCP
(1) / 853-031685-001 / Match assy, main TCP
(4) / 853-034160-001 / Controller, vds
(1) / 853-072156-001 / Assy, esc, high temp, 200mm
(1) / 853-140218-001 / RF Match
(1) / 853-140218-003 / Upper, match
(1) / 853-140218-003 / Upper, match
(1) / 853-180033-003 / Manifold chamber roughing weldment heated
(1) / 853-330689-001 / Lower match assy
(2) / 853-5048-001 / Anode assy 8"
(1) / 853-810590-001 / Assy, ups mdl
(1) / 855-010409-007 / Assy, cpu prog eprom ver h
(1) / 856-017340-201 / Resistor bank retrofit
(1) / 856-020267-014 / Manifold, hyt
(2) / 856-347385-001 / Kits, retro, strpr press relief
(3) / 856-347385-001 / Kits, retro, strpr press relief
(1) / 990-004357-001 / PCB Solenoid assy
(4) / A778-010516R001 / Chillers, m&w tcu dual operational.
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