Used LAM RESEARCH / ONTRAK Lot of spare parts #9281714 for sale
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ID: 9281714
Qty / P/N / Description
(1) / 69600001 / Coors ceramic ring
(8) / 716-330122-002 / Coors ceramic rings
(1) / 25987 / Insulator, lower electrode 6"
(1) / 26085 / Insulator ring 5"
(2) / 27356 / PCB assy, amn MK3 controls
(1) / 42312 / (2) Ring, upper, lower electrode
(1) / 600164 / Ring electrode clamp
(1) / 600582 / Ring, electrode clamp 6"
(1) / 600749 / Kit pin wafer lift (For asiq 715-011746 edge ring 6" wafer clamp)
(1) / 600759 / Leadscrew assy 384t
(1) / 601240 / AMN III encoder buffer assy
(1) / 601367 / Rod ASM RF upper elct assy
(1) / 602246 / Ring, GND ext 100-150 1 end pt
(1) / 2101073 / DA Ped lift assy, stat QTZ, teflon
(2) / 2101362 / Clamp, 5" 60 deg hf wafers
(2) / 2101363 / Wafer clamp 6" 60 deg hf
(2) / 2201029 / Rubber flex couplings
(5) / 2201523 / Motor pulley 6T16-018DF2508
(1) / 2301205 / 6 stat Qtz bottom trode assy
(16) / 2301718 / 384t cartridge pin assy II
(2) / 2301853 / Ceramic lower insulator rings 6" .096 thickness
(2) / 2500210 / Enclosure, wide range match networks
(1) / 2600412 / oscillator control signal cable
(1) / 08-30465-001/ 2 /3 / 3 piece set pulp catch cup accumulator
(1) / 2003358-7 / Transport opto switch cable assy
(1) / 2600581-PR / Purch, 1kW RF Gen CA kit
(1) / 515-11835-001 / Domed electrode leveling tool plate
(1) / 518-093762-001 / Hydrometer 1.000-1.225
(1) / 530-2-14-474-788 / -
(3) / 714-008778-001 / Lower baffle screens
(2) / 715 160164.004-1 / Hinges
(1) / 715-002206 / Clamp ring electrode
(1) / 715-006856 / Mount ball screw
(4) / 715-011887-001-E2 / Anodized clamp retainer bolts
(1) / 715-028626-104 / 6" Upper baffle
(1) / 715-030174-001 / Ring clip gap barrel right #2
(1) / 715-030174-001 / Ring clip gap barrel left #2
(1) / 715-11582-001 / 6" Showerhead / baffle - electrode
(1) / 715-8763-1 / Baffle plate w/ new screen
(1) / 716-011572-001 / Clamp retainer 1/4 turn
(1) / 716-011638-005 / Focus ring
(1) / 716-011963-003 / Plate, clamp attachment
(1) / 716-028722-181 Rev-1 / Ceramic ring-lam
(1) / 775-006659-001 / Filter air bulkhead
(1) / 810-15987 / TCP autotune board
(1) / 810-17003 / Drive impd & ph board
(1) / 810-17004 / Solenoid interlock board
(1) / 810-17004-001 Rev-4 / Solenoid interlock PCB
(1) / 810-17005 / Solenoid interlock board
(1) / 810-17012-1 Rev-D / heartbeat board PCB for 4428B rainbow plasma etch sys
(1) / 810-17021-1 / AD10 rev 5 PC board serviceable
(1) / 810-8582-1 Rev-B / phase & mag detector board MD: 114-320616
(1) / 840-9865-X / HPS bellows valve repair kit
(1) / 853-008389-002 / Lifter anode assy
(1) / 853-010574-001 Rev-A / Gateway board power supply cable 30"
(1) / 853-012530 / assy, vac, bulk, fru
(1) / 853-013541-002-A-2310 / Valve actuator with vexta motor Ph 265-02
(1) / 853-017817-030 Rev E / emo cable assy for ac control box
(1) / 853-017825-060 Rev-E / Belden 6c shielded emo cable etcher to RF generators 62"
(2) / 853-031555-001 / Heater assy, adjust housings
(2) / 853-090221-001 / 490 Sprocket assemblies we R-308-0040
(1) / 853-220129-002-E2-C131 / Press. dist. manifold, 12 sta. SMV NVJ314MY valves
(1) / 853-370606-060 / Cable 60"
(1) / 853-370797-100 / Cable 100"
(1) / 853-494947-050 Rev-A / Pump cable assy
(1) / CMLA-11502 / Pressure transducer
(1) / - / Ceramic top ring
(9) / - / Ceramic top rings.
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