Used LAM RESEARCH Process chamber for Alliance Exelan HPT #9270763 for sale

Name: LAM RESEARCH Process chamber for Alliance Exelan HPT
Brand: LAM RESEARCH
SKU: 9270763
Availability: SoldOut

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Manufacturer

LAM RESEARCH

Model

Process chamber for Alliance Exelan HPT

Equipment Details
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ID: 9270763

Wafer Size: 8"

Vintage: 2001

Etcher, 8" Pressure gauge: 685-097707-002 Gate valve: VAT98801-R1 Gate valve controller: VAT VM-6 Turbo pump: STP-A1603C Turbo pump controller: SCU-A1604C Bias RF generator: OB1-R03 Power supply: 208 VAC, 50 A, 50-60 Hz, 4 Wires Gas boxes missing 2001 vintage.