Used LPE Spare parts for 2061 #9389180 for sale
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ID: 9389180
(3) EPI Kits:
Part number / Make / Description
CP53-1 / QUARTZ / ATM, Bell jar
CP53-2 / QUARTZ / Cup
CP53-3 / QUARTZ / Drain tube
CP53-4 / QUARTZ / Base plate half with hole
CP53-5 / QUARTZ / Base plate half without hole
CP53-6 / QUARTZ / Top disk
CP53-7 / QUARTZ / Spacer
CP53-8 / QUARTZ / Umbrella
CP53-9 / - / Turn table cap
CP53-10 / - / Umbrella spacer
Extra parts:
Qty / Part number / Make / Description
(2) / TS0887WQ / - / Rev 1 SIC Long susceptors
(2) / TS679WQ-0 L SGL 9J157 / - / -
(4) / TS0677WQ / WFR-SIC / - / Barrels
(2) / TS0679WQ / WFR-SIC-T / SGL CARBON / Plates
(15) / TS0676WQ / SIC / SGL CARBON / Lower baffle plates
(15) TS0675WQ / SIC / SGL CARBON / Upper baffles
(4) / WQ5342 / SIC / SGL CARBON / Supports
(2) / - / - / Susceptors
Used parts:
Qty / Part number / Description
(1) / WQ5342 / SGL Carbon SIC Support
(3) / TS0679 WQ / -.
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