Used NIKON Spare parts for i14, EX14, S202 #9244661 for sale
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ID: 9244661
Qty / Part number / Description
(1) / 4B020-355AN / REX RL Full assembly
(1) / 4S061-666 / Y Fine stage Amp (S202) / Reticle stage (i14)
(1) / 4S602-208-1 / MAXON DC Motor
(1) / 4B019-966 / Load/Unload slider assembly
(1) / 4S585-505 / Accelerometer controller
(2) / 4S990-734 / JK-5D16A Video distributors
(2) / 4S288-077 / Humidity transmitters
(1) / 4S069-762 / Sub alignment controller power unit
(8) / 4S259-024 / Interferometer receivers
(1) / 4S782-443 / 4S061-619 / ALCP Sensor box
(6) / 4B990-538 / Carrier station LED's
(1) / 4B990-840 / FIA Lamp power supply
(4) / 4S258-054 / 4S258-100 / KEYENCE Sensors (FS2-60) with fibre heads (FU35-FA)
(1) / 4B991-102 / CT Rotation (complete assembly with motor and encoder)
(2) / 4S032-643AN / Wafer stage flat cables
(1) / - / Wafer stage X mirror
(1) / - / Wafer stage Y mirror
(1) / 4L990-837 / Irradiance and uniformity sensor
(4) / ZRGT2210-M / TDK Noise filters
(1) / 4B990-540 (LED) 4B990-541 (Sensor) / WL3 Centre detection LED & sensor unit
(1) / - / Fultra 3 Phase Fan
(1) / RAX4B-15R / TDK Power supply ( 48 V 16 Amp)
(2) / FX-128MR / MITSUBISHI Programmable controllers
(2) / 4S064-050 / NIKON VCM Amps ( 48 V 10 A)
(1) / 4B024-508 / Pneumatic control box for air mount (AVIS)
(1) / 4B990-875 / NA Variable drive assembly
(1) / 4B990-525 / AF Sensor unit
(2) / 4S585-114 / CCD Video camera modules (Model XC-73) DC 10.5-15V
(1) / 4B990-963 / Reticle microscope drive assembly ( X1, Y)
(1) / 4B990-964 / Reticle microscope drive assembly ( X2, Theta)
(1) / 4S602-132 / RL Robot Z drive motor UGQMEM-02MAKOE UTOPI-020SE
(2) / - / Water manifolds
(1) / - / YASKAWA(CATC) frequency controller (Model: CIMR-XCAA20P4)
(1) / - / YASKAWA(BATC) frequency controller (Model: CIMR-XCAA21PC)
(1) / - / LLTC Tank
(2) / - / YAMATAKE Honeywell controllers SDC40
(11) / 4S288-119 / Liquid pressure sensors PS8-102G
(1) / 4B023-836 / FIA Lamp housing (Complete assembly)
(1) / CS680-017-1 / Toyozumi 500VA Transformer
(1) / PAA100F-12-N / Cosel power supply ( 12V ~ 8.5A)
(1) / PAA50F-5-N / Cosel power supply ( 5V ~ 10A)
(1) / PAA100F-24-N / Cosel power supply ( 24V ~ 4.5A)
(1) / RAW24-16R / TDK Power supply ( 100-240V ~ 5.6 - 2.8A 50/60Hz).
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