Used TEL / TOKYO ELECTRON LHP #9195799 for sale
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ID: 9195799
Low temperature hot plate process station
Removed from TEL Clean Track Lithius system
Parts list:
Assembly P/N: 5087-401692-19 Base(HP) assy, back
Pin(LHP) assy: 5087-401693-14
Support assy: 5085-407314-12
Base (E-LHP) assy: 5087-401375-16
Cover (HP) assy: 5085-407301-12
Plate assy: 5085-402639-13
Chamber (LHP) assy: 5085-407323-15
Cover (LHP)ASSY back: 5085-407933-14.
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