Used TEL / TOKYO ELECTRON LHP #9195864 for sale
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ID: 9195864
Low temperature hot plate process station
Removed from TEL Clean Track ACT12-300 system, 12"
Part list:
LHP Sub unit base assembly P/N: 2985-403750-W7
LHP Plate support assembly P/N: 2985-428775-W1
LHP Shutter assembly P/N: 2985-527777-11
LHP Ext. cover assembly P/N: 2985-401328-W4
N2 Purge assembly P/N: 2985-413218-W1
Cover aperture P/N: 2985-440725-W1.
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