Used TEL / TOKYO ELECTRON Lot of spare parts for TE 580LC #9274928 for sale

Qty / Part number / Description (2) / 9031103-0 / Outer gate assy (50) / PT-550 / Photo sensor light receptions (4) / 054-103352-1 / Potentiometers (6) / MMTD2585G-12 / 4G-100 / GAP drive gear motors (5) / 2233F012S / DC Geared motors (10) / 4G-100 / GAP Motor gearheads for TE48 / 580 (1) / 8DG75 / Gear head (1) / TD2444G-12H 8DG50 12V / GAP motor (1) / 1M87-000440-11 / Sensor assy gap for TE580 (2) / Z26460 9P30026-1 / Upper electrode gas plates (Aluminum) screw (1) / M10-402859-6 / Bolt cap (3) / M10-402205-4 / Clamp ring insulating bushs (8) / SP-1 / Set screw for shield rings for TEL580 (4) / - / Front rear windows (2) / 1072000-001 / Shield rings (3) / M10-402207-1 / Clamp rings Mekura (4) / - / Exhaust rings-C (2) / - / Exhaust rings-L (1) / - / Exhaust ring -R (1) / 1880-026696-12 / Upper electrode (Amorphous electrode) (1) / - / Lower electrode (1) / - / Flange (3) / - / Upper electrodes (42) / AS568A-217 / O-rings (24) / AS568A-249 / O-rings (32) / AS568A-218 / O-rings (26) / SFR-188 / Bearings (1) / CPJ20-BL-8-8 / GAP motor coupling (5) / M10-402843-1 / Wafer rotation shafts (2) / C-2-50-40-R2 / Air cylinders.