Used TEL / TOKYO ELECTRON Lot of spare parts for Unity #9252110 for sale

Qty / Part number / Description (1) / ES2L05-350050-11 / Ring, insulator poly (1) / ES012-009187-1 / Ring, 203217 (1) / ES012-009184-1 / Plate 92228-01 (2) / ES2L12-000040-11 / Valves, vacuum XLA-25A-XL143 (1) / ES3D10-250442-11 / Focus ring 380-T4.0,E (2) / 3DLO-250675-11 / Rings, outer top (SI-5K) S-DRM (4) / ES3M87-032788-12 / Parts kit grease up GV-300T (1) / CT2980-006523-11 / Sensor 12" mapping 12" MAPH E32 (1) / DS2112-000122-11 / Controller, pressure VEC CF8-X0001 (1) / CX13-000001-11 / Valve, vacuum, XLDQ-40-X1 (2) / ES3DLO-302020-31 / CEL, OX TLO 75 C912 (COC_N) (1) / ES2LLO-150716-11 / Plate (D3T4), deep exhaust V2.