Used TEL / TOKYO ELECTRON Lot of spare parts #9266603 for sale

Part number / Description BB10-100620-12 / Shower plate 3M10-300476-11 / CVD Unity shower plate 3M10-200150-11 / CVD Unity mixing plate 1810-220952-14 / Cooling plate 1810-224220-12 / Cooling plate 1010-201588-12 / Upper electrode 1810-121366-11 / AL Depo shild ring (P/C1) 1810-121367-11 / AL Depo shild ring (P/C2) 1810-326593-15 / Screw cover A-C 1010-101475-11 / Plate baffle 1810-121857-12 / Plate block 1810-121786-12 / Plate RF 1810-121692-12 / Shield depo upper-AL P2 1810-224473-13 / Ring, out 1810-328284-12 / Cover screw A-AL chamber 1810-328284-12 / Cover screw B-AL chamber 1810-121677-12 / Plate exhaust T6 EXH S850DI 1010-101398-11 / Baffle plate 1810-431128-11 / Screw - / Bellow space ring 1810-224611-11 / Slit plate EXH W1.6 P3 1810-328318-11 / AL Wall chamber (UP) (GND) (STEMP) 1810-328319-11 / AL Wall chamber (LOW) (GND) (STEMP) 1810-328321-11 / AL Wall chamber (L) (GND) (STEMP) 1810-328320-11 / AL Wall chamber (R) (GND) (STEMP) 1810-224951-11 / Ring, centering type-1 1810-121899-12 / Plate exhaust T6 AN 1810-121591-14 / Liner A EXH, AN 1810-327572-14 / Liner B EXH 1810-329303-11 / Cover, bellows A (AD), AN 1810-329022-13 / Liner adapter (AL) type 2 1810-224953-12 / Liner C gate chamber, AN 1810-329078-11 / Cover screw A-AL AN 1810-329079-11 / Cover screw B-AL AN 1810-121903-11 / Shield depo upper P1, AN 1810-121898-11 / Shield depo lower, AN 1810-329064-12 / Window, AL-3, AN 1810-121903-11 / Shield depo upper P2, AN - / Chamber lid-gas plate base for 3M - / Gas plate bush for 3M - / IEM Holder - / T5000 Upper electrode - / Shutter liner (Poly).