Used TEL / TOKYO ELECTRON SCCM #9192402 for sale

ID: 9192402
Wafer Size: 12"
Chamber, 12" With turbo pump.
TEL / TOKYO ELECTRON SCCM is an advanced etching/asher technology used in the semiconductor industry. TEL SCCM is capable of high precision etching processes in a high-speed and low temperature processing environment. This technology is used in the production of advanced electronic devices and semiconductor components such as semiconductor chips. TOKYO ELECTRON SCCM asher utilizes a plasma etching process to create electrical circuits with extreme accuracy. Etching is accomplished by using a magnesium halide gas to create an ionized plasma. Electrical signals are then applied to the surface of the substrate to be etched and the plasma will react to that signal to selectively break down the material and form patterns in the substrate. This is known as reactive ion etching (RIE). SCCM etcher is engineered to be compatible with a vast range of substrates, enabling users to produce multiple generations of chips. TEL / TOKYO ELECTRON SCCM etcher offers extremely high-speed performance and low process temperatures, significantly reducing production times and costs. This process reduces etching time while producing tight/smooth/detailed profiles with minimal desired ion damage on the semiconductor material. The process also helps maintain oxide and passivation layers. TEL SCCM etcher also contains features such as an in-situ spectroscopic end-point detection system, which monitors the etching process in real-time and detects the presence of the etched layer in the semiconductor. This system allows users to accurately determine the exact point of etching with great accuracy and confidence, allowing them to achieve maximum yields in device manufacturing. TOKYO ELECTRON SCCM also contains an advanced high-resolution wafer microscope which allows users to view the etching process and confirm etch depths. Overall, SCCM is a powerful and versatile etching/asher technology designed for quick, detailed and accurate circuit formation. The ability to accurately etch down to the substrate layer, in combination with its fast etching speeds and low process temperatures, truly makes TEL / TOKYO ELECTRON SCCM a revolutionary tool for the semiconductor industry.
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