Used TEL / TOKYO ELECTRON Spare parts for PR-200Z #9351877 for sale
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ID: 9351877
Qty / Part number / Description
(1) / 012-007717-1 / Valve / Solenoid valve VQZ3420Y-5L-02-Q
(2) / 1B10-337206-11 / Holder WAF under
(2) / 1B10-337205-11 / Holder WAF middle
(4) / 1B10-333220-15 / Holder WAF upper
(1) / 036-005951-1 / Photo electricity SW HPX-ETS
(3) / 018-002571-1 / Slide pack 2FBW2560RUU+480L(N.GRS)
(2) / 024-016042-1 / Differential pressure gage KU-604-300PA-B
(1) / 1B10-338561-11 / Hand wafer 25
(7) / 036-003733-1 / Sensor fiber E32-T16P
(1) / 036-002916-1 / Photoelectric SW Amplifier E3X-NT11
(1) / 024-016953-1 / FM..FM-PR36G-432-B10-01
(1) / 012-008037-1 / Solenoid. SS5Q13-12-X196
(1) / 1B02-300956-11 / LM Guide
(1) / 1B11-000049-11 / Pump..M50U-000-00-0-A0
(2) / 012-007520-1 / Valve / Air operate V,, FPR-91-19.05-CJN
(4) / 1B10-429496-11 / Packaging, Cyrinder
(2) / CTFVOSTPE / Filter / IPA Rinse
(1) / 049-000917-1 / LCD panel IPC-DT/L30S(PC)T
(2) / 1B10-434269-13 / Seal, Base 80C
(6) / G-40 MPB / O-Ring perfluor G-40 black
(4) / 036-005485-1 / Sensor fiber ..QFA0112 Side view
(1) / M50U-000-00-0-A0 / Pump for RP-200Z repaired (KR50EU-00-A)
(2) / 036-005578-1 / Thermocouple -101-F3-100-3000
(3) / PRCZ01P01-J-USE / Filter / Pro tego CFX 0.05μm
(6) / 036-005575-1 / Sensor amplifier FX-D1
(2) / 036-005465-1 / sensor fiber
(1) / 036-004350-1 / sensor F3M-S826
(1) / 023-002529-1 / Timing belt 015-AT5-0594E-L
(1) / 023-000461-1 / Timing belt B100S3M1005G
(1) / 036-006785-1 / Pressure sensor STPL-1/2-GEP
(4) / 1B10-434267-12 / Seal inner 80C
(2) / 1B10-434268-12 / Seal outer 80C
(4) / 1B10-434269-12 / Seal base 80C
(2) / 1B36-000003-11 / Fiber sensor HPF-S295-B
(2) / 036-005726-1 / Sensor fiber (FT-K8)
(10) / 036-001936-1 / Sensor fiber (FT-P8)
(2) / 036-001933-1 / Sensor Amplifier (FX-7)
(2) / 027-001975-1 / O-ring perfluor G-75 BLACK
(8) / 027-003849-1 / O-ring perfluor V-15 BLACK(
(8) / 027-101886-1 / O-ring perfluor P-10 BLACK
(4) / 1B10-427783-11 / Packaging rotor V2
(1) / 027-003476-1 / O-ring perfluor AS-033 BLACK
(4) / 1B10-434266-12 / Seal drian 80C
(3) / 049-001036-1 / Battery / Battery set (CS1W-BAT01)
(2) / 024-005153-1 / Filter / Filter ..WGFG 02P S1
(10) / 1B10-425840-11 / Bush front 2
(10) / 1B10-425844-11 / Bush rear 2
(10) / 1B10-426730-11 / Bush guide 3
(4) / 1B10-427835-13 / Color rear V2
(4) / 1B10-427836-13 / Color front V2
(4) / 1B10-427782-11 / Packaging arm V2
(10) / 1B02-400839-13 / Spring EP
(2) / PRCV0S0P1-J-USE / Filter / Pro tego DCF 0.1µm
(4) / 024-022638-1 / Air cylinder
(22) / 012-001564-1 / Auxiliary V..AQ3000-03
(2) / G-105 / O-ring perfluor G105
(1) / AS568-177 / O-ring perfluor AS568-177
(50) / EPDM AS568-330 / O-ring EPDM AS568-330
(1) / 027-003305-1 / O-ring perfluor G-90 BLACK
(2) / 027-001114-1 / O-ring perfluor G-190 Black
(10) / BARREL PERFLUORO G-40 / O-ring perfluor G-40 MPB
(2) / FX-301-C1 / Fiber sensor (PR-200Z)
(1) / 1B36-000031-11 / Sensor SSY DP-C-12 (PR-200Z).
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