Used TEL / TOKYO ELECTRON Spare parts for Unity II 85DD #9378258 for sale

TEL / TOKYO ELECTRON Spare parts for Unity II 85DD
ID: 9378258
Qty / Part number / Descripition (7) / ES1D10-309946-12 / Focus ring (7) / ES1D05-300188-12 / Ring insulator A7 (7) / ES1D05-300190-12 / Ring insulator B2 (3) / ES1D10-204338-13 / Upper electrode (2) / ES1D10-315272-11 / Ring shield (2) / ES1D05-400022-14 / Window shield depo (Y2O3 Coated) (2) / ES1D10-102848-13 / Baffle plate (2) / ES1D10-204419-12 / Cover belows (2) / ES1D10-315183-15 / Depo shield (6) / ES027-100389-1 / O-Ring viton.. AS586-259 BLK, ES0.
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