Used VARIOUS Lot of spare parts #293759804 for sale
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ID: 293759804
Etch process ESC:
Make / Part number / Description
LAM RESEARCH / 718-094523-281 / Anodizing ESC, 8"
LAM RESEARCH / 718-092326-081 / Anodizing ESC, 8"
TEL / TOKYO ELECTRON / 1D10-101567-12 / ESC Assembly for DRM, 8", Wafer type: Notch
TEL / TOKYO ELECTRON / 1D10-101965-12 / ESC Assembly for DRM, 8", Wafer type: Notch
TEL / TOKYO ELECTRON / 1D85-006978-13 / ESC Assembly for DRM, 8", Wafer type: Notch
TEL / TOKYO ELECTRON / 1D85-006979-12 / ESC Assembly for DRM, 8", Wafer type: Flat
TEL / TOKYO ELECTRON / 1810-121864-11 / ESC Chuck for SCCM, 8", Wafer type: Flat
TEL / TOKYO ELECTRON / 1D85-010782-13 / ESC Chuck for SCCM, 8", Wafer type: Flat
TEL / TOKYO ELECTRON / 1D85-010783-13 / ESC Chuck for SCCM, 8", Wafer type: Notch
TEL / TOKYO ELECTRON / 1D87-006149-13 / ESC Chuck for SCCM, 8", Wafer type: Notch
CVD Process ESC:
AMAT / APPLIED MATERIALS / 0040-48594 / CVD Ultima ESC, 8", Al2O3 Plate
AMAT / APPLIED MATERIALS / 0010-03840 / Heater for producer
AMAT / APPLIED MATERIALS / 0010-03843 / Heater for producer
AMAT / APPLIED MATERIALS / 0010-02342 / Heater for producer
AMAT / APPLIED MATERIALS / 0040-02538-003 / AIN heater.
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