Used SPTS / STS / TRIKON Equipment for sale
SPTS, also known as SPTS Technologies, is a leading global supplier of advanced wafer processing solutions. Founded in 2009 by combining three well-established semiconductor equipment manufacturers - Surface Technology Systems (STS), Sumitomo Precision Products (SPP), and Trikon Technologies - SPTS has over 50 years of industry experience. The roots of the company can be traced back to STS, which was established in 1982 as a supplier of specialized etch and deposition solutions. Through significant research and development efforts, STS successfully developed several groundbreaking technologies, such as deep reactive ion etching (DRIE) and pulsed-CVD. This expertise in etch and deposition processes paved the way for SPTS to become a world-class provider of advanced wafer processing systems. SPTS offers a comprehensive range of products, including etchers, ashers, vapor phase wafer cleaning systems, dielectric deposition solutions, and plasma-enhanced CVD systems. Their etchers and ashers excel in various processes, such as plasma etch, isotropic etch, and capacitive-coupled plasma processing, allowing customers to achieve precise etching and removal of materials on wafers. One of the company's flagship products is the Rapier XE, a plasma etch processing system designed for advanced semiconductor packaging applications. It provides exceptional process flexibility, utilizing endpoint reading and advanced control algorithms to deliver maximum etch rate and process uniformity. With a strong focus on innovation and customer-driven solutions, SPTS continues to play a significant role in driving advancements in the semiconductor industry. Their cutting-edge products and dedication to quality have enabled them to establish partnerships with major companies in the Advanced Packaging, MEMS, Power Device, and RF markets, ensuring their continued success as a leading wafer processing solutions provider.