Used TRIKON Sigma 200 #9293542 for sale
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ID: 9293542
Wafer Size: 6"
Vintage: 1990
Sputtering system, 6"
Triple rack for RF Power supply
Turbo controller
Dealer controller
Main computer (CTC)
Data logger computer
AC Tray
Rack controller
Platen heater controller
RGA Controller
Operating system: FlexOS Version 3.01S
VCE (A & B):
Process: Wafers loaded, pumped and mapped prior
Vent gas: Nitrogen
Hot Sputter Etch (HSE):
Etch
Preheat module
Power (Coil and platen): 600 Watt
ADVANCED ENERGY RFX600 Generator (13.56 MHz)
Cryo pump, 8"
Process gas: Argon
50 SCCM MFC
300 SCCM MFC
Vent gas: Nitrogen
Platen heating: 450 C
Gauge to control and monitor vacuum
Deposition chamber (TiN):
Deposit Ti and TiN
Platen RF bias power: 600 Watt
ADVANCED ENERGY RFX600 generator (13.56 MHz)
Cryo pump, 8"
Process gas: Argon
300 SCCM MFC
100 SCCM MFC
Vent gas: Nitrogen
Platen heating: 450°C
Gauge to control and monitor vacuum
Deposition chamber (Al):
Deposit Al
Cryo pump, 8"
Process gas: Argon
300 SCCM MFC
Vent gas: Nitrogen
Platen heating: 450°C
Gauge to control and monitor vacuum
Transport chamber (Dealer):
Turbo pump on board
Vent gas: Nitrogen
Metal wafer cassette
1990 vintage.
TRIKON Sigma 200 is an etcher/asher designed to etch various materials such as steel, brass, and other metals. It is suitable for use in metalworking, prototyping, and other special processes requiring extremely precise etching or ashing. The system features a single vessel etching and cooling chamber and a vertical arm lifting system for convenient material handling. The etching chamber is made of 6mm thick stainless steel and incorporates a 50mm high viewing window on the Right side and a removable cover plate. The etching chamber is filled with Argon, Hydrogen or other inert gases. Temperature is monitored with a digital pyrometer and is adjustable and controlled from room temperature up to 1,000°C. The arm lifting system is operated manually, allowing the user to move the materials within the chamber in a smooth and accurate way. Sigma 200 is powered by a 0.4 kW mains motor. It features an automatic process timer and a digital display for readout of the temperature, etching time, and other parameters. It comes equipped with an automatic temperature control to maintain optimal processing conditions, as well as over-temperature protection for added safety. The etching chamber is secured by a safety switch and has several safety features such as automatic shut-off protection for both temperature and pressure. The processor is designed for optimal efficiency. It is equipped with a regenerative blower for enhanced air flow which can be adjusted via the control panel on the side of the unit. This results in improved etching results. It also has an advanced thermosimulation technique which can be used for creating complex etching patterns or micro-etching on materials such as stainless steel and brass. Overall, TRIKON Sigma 200 is a reliable and powerful etcher, asher, and processor well suited for use in a wide variety of applications requiring precise etching or ashing results. With its intuitive design, customizable settings, and advanced safety features, it allows users to create high-quality products efficiently and with ease.
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