Used ACCRETECH / TSK A-CS-100A #9123958 for sale
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ID: 9123958
Wafer Size: 4"-8"
Vintage: 2007
Manual spin cleaner, 4"-8",
2007 vintage.
ACCRETECH / TSK A-CS-100A is a wafer and mask scrubber designed for use in semiconductor wafer fabrication process and CMP processes. It is an automatic, programmable, multi-function scrubber that can be used in cleanroom environments. TSK A-CS-100A utilizes latest optimized CMP polishing techniques to obtain high quality and high precision surface processing results. This scrubber features a Belt Machine design that helps provide uniform processes as it is not affected by the workpiece shape. With updated technologies, ACCRETECH A-CS-100A ensures advanced and efficient cleaning capabilities. It also includes an air filter unit with autoseparating and washing functions in order to prevent foreign particles caused by the surrounding environment. The scrubber is equipped with features to ensure a wide range of stable polishing such as 15 preset recipe programs, manual and semiautomatic process controls, and parameter edits. Additionally, A-CS-100A has a touch operation panel with an LCD monitor for easy operation and monitoring of processes. This scrubber also includes other standard features like a self-diagnostic system, a pulley-shaped work table that accommodates straight lines and twist direction, and a harmonic drive control. ACCRETECH / TSK A-CS-100A is also accompanied by safety-related features such as abrasive slurry safety systems and air filtration systems that detect any foreign particles in the cleanroom environment in order to prevent contamination of the workpieces. Furthermore, it has both an emergency stop switch and an automatic front door, both of which can be used to stop the process in case of an emergency or if the operator needs to enter the cleanroom. TSK A-CS-100A is also equipped with a high speed vacuum exhaust fan system designed to reduce the noise level during operation. In conclusion, ACCRETECH A-CS-100A is an advanced automatic wafer and mask scrubber designed for use in cleanroom environments. This scrubber is equipped with a wide range of features such as 15 preset recipes programs, manual and semiautomatic process controls, parameter edits, and air filtration systems. Furthermore, A-CS-100A has safety-related features such as abrasive slurry safety systems and an emergency stop switch and an automatic front door. ACCRETECH / TSK A-CS-100A is optimized to provide a wide range of high quality and high precision surface processing results for wafer fabrication processes and CMP processes.
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