Used AOC MAST-3000-AT #9145578 for sale
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ID: 9145578
Mask cleaning system
Main units:
Loader
CC-1 bath
Nanostrip-1 bath
Nanostrip-2 bath
QDR-1 bath
QDR-2 bath
IPA vapor dryer
Unloader
Hot DIW (48kw)
Specification of process baths:
Chuck cleaning bath(CC bath)
Nanostripbath
Quick drain rinse bath (QDR)
Isopropyl alcohol vapor bath (IPA)
Chemical supply box
H2SO4 Buffer & Circulation unit
H2O2 Supply
H2SO4 Supply
IPA Supply.
AOC MAST-3000-AT is a high-performance automated wafer and mask scrubber designed to increase the efficiency and accuracy of photomask preparation in the modern semiconductor industry. The scrubber is an advanced equipment which can handle up to 6" (150 mm) reticles and up to 10" (250 mm) wafers with a maximum mask holder weight up to 1.2 kg. It is compatible with all standard photomask cleaning solutions and buffering agents. MAST-3000-AT offers a comprehensive range of features to automate scrubbing actions such as controlling speed, pressure, and dwell time to ensure the highest amount of quality and consistency in the cleaning process. The scrubber is equipped with a stepper motor driven dual scrub wheel which ensures uniform and consistent scrubbing over a large area. It also features an adjustable head which allows for fast and easy movement between wafers or mask holders. The system offers a powerful yet quiet ventilation unit to control airborne particles and fumes. Furthermore, the scrubber comes with a safety cover which can be opened in cases of emergency to prevent accidental spills. The scrubber is also equipped with a stainless steel construction for maximum corrosion resistance and durability. AOC MAST-3000-AT is designed to maximize production throughput with the use of advanced motion control algorithm and image processing machine. The scrubber uses a custom built motion control algorithm to calculate the optimal scrubbing pattern for each of the wafers or masks and the tool can be customized to user requirements and specifications. This feature increases the overall accuracy and consistency of the scrubbing process. In addition, the scrubber provides an image processing asset which can detect any scratches or other damages on the wafer surface. The scrubber is also equipped with a standard interface which enables data transfer between the model and the customer's other systems. MAST-3000-AT is a powerful and reliable scrubber ideal for large and small wafer cleaning processes in the semiconductor industry. It is a cost-effective and efficient solution for the modern production environment.
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