Used BROOKS AUTOMATION Fixload TM #9401143 for sale

ID: 9401143
Wafer Size: 6"
Vintage: 2006
Load port, 6" 2006 vintage.
BROOKS AUTOMATION Fixload TM is a wafer & mask scrubber designed to address the challenges of physical defects on semiconductor wafers and masks, resulting in improved yields for chip manufacturers. This innovative and cost-effective scrubber offers a variety of features and capabilities that enable more efficient cleaning and no contamination of the wafers and masks. The machine consists of a scrubbing deck with an overhead, meandering roundabout. The deck serves as the substrate holder and the roundabout is the vehicle for cleaning and drying them. This useful feature helps to reduce the amount of contact points that may cause contamination with the substrate, resulting in longer cleaning times. The main scrubbing module contains two independent scrubbing zones which are designed to simultaneously remove physical defects on both sides of the substrate surface. This helps to ensure uniform surface characteristics and remove any possible contaminant build-up on the wafer or mask. The Fixload equipment makes use of powerful jets of turbulent air that are directed at the substrate and can be adjusted to the target surface. The scrubbing process is supported with an in-line particle detection system that allows uniform and controlled scrubbing. This unit works by incorporating a powerful laser and camera machine which scans and analyses the defects, giving manufacturers real-time feedback on the status of the scrubbing process. The Fixload offers a fully automated wafer and mask cleaning process, ensuring the highest levels of cleanliness and accuracy. The machine is capable of handling many different types of substrates, from stacked die to thin films to multi-level FEOL and BEOL. It is also capable of cleaning 100mm and 200mm wafers with unparalleled performance and accuracy. In conclusion, Fixload TM is a powerful and highly automated wafer & mask scrubber that provides a comprehensive and cost-effective solution for removing physical defects on semiconductor wafers and masks. It provides excellent performance, accuracy, and process control while offering a fully automated cleaning process to guarantee cleaner substrates. With its ability to handle a wide variety of wafers and masks, BROOKS AUTOMATION Fixload TM is an invaluable tool for chip manufacturers looking to reduce non-conforming products and improve profits.
There are no reviews yet