Used CSK HEATS-05 #293647981 for sale

CSK HEATS-05 is a high-efficiency automatic wafer and mask scrubber equipment designed for cleaning semiconductor devices. This system is part of CSK Heats series of scrubbers used in semiconductor device manufacturing. The unit utilizes a low-vacuum cleaning process that utilizes ionized air to remove contaminants from wafers and masks. This process is able to remove any particles down to 20nm, which makes it effective for removing particles from the surface of the device. The process also provides superior cleaning of rough or scratched surfaces before curing and lithography. The machine is composed of three main parts: a platen, a vacuum chamber, and a power supply. The platen is a radiation-proof aluminum work surface that is heated to the desired temperature by a built-in heater. The vacuum chamber is designed to draw air into the tool in a cycle, while the power supply supplies the asset with electrical power. The platen is equipped with two wafer pads and four scrubbing heads that move over the surface of the wafer or mask to clean them. The platen can be heated to a maximum temperature of 200°C for effective cleaning. After being treated with ionized air, the wafer is then placed on the platen to be dried and treated with UV or Laser for curing or lithography. The model is able to process the wafer or mask up to the size of 8" x 10", with a maximum cycle time of 60 seconds. HEATS-05 offers a consistent and reliable cleaning process that is easy to operate and provides safe cleaning of wafers and masks. The equipment is compatible with a wide range of device manufacturing processes, making it a great choice for any semiconductor device manufacturer.