Used CSK HEATS-05 #9278131 for sale

Manufacturer
CSK
Model
HEATS-05
ID: 9278131
Vintage: 2014
Thermal wet scrubbers 2014 vintage.
CSK HEATS-05 is a wafer and mask scrubber, commonly used in semiconductor manufacturing, including photolithography, etching and deposition. This scrubber is designed to wash and clean the processing equipment used in chip manufacturing. It is a re-circulating flowable bed scrubber with electrolytic cleansing technology that promises high efficiency cleaning with minimal consumption of chemicals, water, and scrub material. The process, which is carried out in a sealed chamber, is capable of removing organic contaminants, dust particles and slag, as well as other production house residue. The cleaning chamber is segmented into three different areas: the first area is for the entry of wafers, masks or other materials to be cleaned; the second area is for processing the materials to be cleaned; the third is for the tank and filter units where the process medium (usually a deionized water solution) is stored and recycled. The cleaning agent used in the option is a mixture of sodium borohydride and a surfactant, which breaks down and loosens particles or dust adhered to the surface of the substrate. The cleaning solution circulates through the brush-roller scrubber and the substrate is exposed for a certain amount of time to ensure complete surface cleaning, with temperatures in the air reaching up to 80-degree centigrade. After the cleaning process is complete, the substrate is then rinsed and dried. HEATS-05 is designed for the heavy-duty, round-the-clock cleaning process and is suited for high production capacity chip fabrication. It features high speed and efficiency, as well as low noise and vibration levels. The scrubber is fitted with embedded control systems, allowing the scrubbing and washing processes to be automated. Moreover, the equipment has the capability of monitoring parameters such as time, agitation level, temperature and concentration of the cleaning agent, monitored by a system of sensors and a dedicated control software. The overall design of CSK HEATS-05 is reliable and rugged, with a focus on consistent and efficient operation even under harsh production environment. The unit is user-friendly and user-adjustable, allowing for easy cleaning machine optimization and providing greater flexibility and better control over the cleaning process. The tool is also fitted with none-nonstop cleaning safety features to ensure safe operation. Overall, HEATS-05 provides a highly efficient, safe and reliable cleaning asset for a wide range of wafer and mask cleaning requirements needed in the production of semiconductor chips, offering a high degree of reliability, consistency, and cost-effectiveness.
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