Used DAS ESCAPE #9300744 for sale

DAS ESCAPE is a wafer and mask scrubber designed to maintain the highest possible levels of cleanliness in the manufacturing of semiconductors. It is particularly suitable for post-etch and post-photoresist wet cleaning processes. ESCAPE has an ergonomic design that allows it to be integrated into existing production lines. The scrubber is equipped with an energized scrub brush that can be adjusted for various cleaning tasks. The wafers can be loaded in the scrubber in one of three ways - by a cassette, cassette rack, or manually. The two-step batch cleaning cycle begins when two brushes begin to rotate independently in forward and reverse directions. This creates a rotational impact that is applied to the wafers, generating a high scrubbing force that is ideal for removing dirt and debris. DAS ESCAPE is fully automated, featuring programmable selection of brush rotation parameters and a process controller that provides readings of cleaning parameters and an End-of-Process Alarm. The wafer cassettes are automatically indexed for proper positioning and the scrubber can clean up to 100 wafers at a time. Additionally, the scrubber features a large window for easy monitoring of parts during the process. The scrubber is also equipped with safety features such as an unbalanced load detector, a splash guard to protect against splashback, and a chamber door interlock to prevent access to the rotating brushes during the cleaning process. The scrubber also relies on a variety of standard filters and purge air to effectively trap particles from the cleaning process and ensure clean air in the scrubber. ESCAPE is easy to maintain, requiring only the replacement of the scrub brushes and filters on a regular basis. The scrub brushes are designed to last through multiple cleaning cycles, and the filters are designed to be easily replaced in the event of contamination. The scrubber also supports fast ramp-up times to reduce downtime between cleaning cycles and is designed to meet the highest standards of cleanliness.