Used DISCO DCS 140 #9255326 for sale

DISCO DCS 140 is a wet-type wafer and mask scrubber designed for use in semiconductor process chambers. It is designed to eliminate the need for manual scrubbing of wafers and masks, reduce particle and organic contamination, and provide consistent results. The scrubber uses a two-step process, which includes a mechanical scrub process and a chemical scrub process. In the mechanical scrub process, a wafer is loaded onto the scrubber platform and the scrubbing head mechanical scrub the wafer with a precise combination of vibrational and rotational motions. In the chemical scrub process, a cleaning agent is dispensed onto the wafer and a water spray is used to rinse the agent away and remove residual particles from the wafer surface. The cleaning agent effectively removes residues created by the mechanical scrub process. DISCO DCS140 scrubber is equipped with several features to ensure reliable scrubbing performance. It has a two-chamber system that can be used in either a sequential system, where the wafer is moved between two chambers, or a single-chamber system, where the wafer remains in the same chamber throughout the scrubbing process. It also has two operation modes - automated and manual - that allow the user to adjust the scrubbing parameters as needed. The scrubber has built-in safety features, including automatic control of the scrubbing head height, a humidity sensor to detect when the water tank needs to be refilled, and safety nets and barriers to ensure operators are protected from potential hazards. It can also be operated remotely from a control panel, which allows for greater flexibility in production processes. DCS 140 scrubber has a compact body with a footprint of only 900H x 600W x 600D mm, making it suitable for facilities with limited space. Its lightweight construction also equips the scrubber with excellent mobility. Additionally, the scrubber is equipped with a water tank that holds up to 7.1 liters of water, allowing it to perform longer scrubbing cycles without needing a refill. The entire contents of the scrubber is visible while it is in use via a clear viewing window, allowing users to monitor scrubbing progress without having to open the scrubber door. The scrubber also features several displays and LED lights that show errors, warnings, and machine status indicators. In conclusion, DCS140 is a reliable and efficient wet-type wafer and mask scrubber designed to meet the demanding requirements of semiconductor production processes. It is easy to use and has a compact size, making it an ideal choice for facilities with limited space.