Used DISCO DCS 141 #9108948 for sale

Manufacturer
DISCO
Model
DCS 141
ID: 9108948
Vintage: 1998
Wafer washer 1998 vintage.
DISCO DCS 141 is a fully automated wafer and mask scrubber designed for precise and efficient cleaning of various substrates. It is capable of scrubbing and polishing a wide variety of wafers, masks, and other components used in semiconductor manufacturing processes. The scrubber machine features a highly efficient, high velocity scrubbing head design which ensures a uniform cleaning process. It can accept wafers up to 200mm in diameter and a thickness of up to 0.3mm. The centrifugal force generator can generate sufficient pressure and velocity for deep scrubbing and polishing. The scrubber uses as DI water, with pH ranging from 7.1 to 8.5, as its cleaning fluid. The cleaning process is fully automated with an integrated controller, which automatically adjusts scrubbing pressure and rotation speed according to product parameters and substrate specifications. For safety, the equipment also automatically shuts down in case of any power or water issues. The DI water system is also designed to detect any air-bubbles or entrained particles during the scrubbing process, preventing their transfer to the wafer. As a result, the cleaning process is very effective and produces higher yields. DISCO DCS141 also features an integrated waste management unit, allowing for easy collection and disposal of debris generated during the scrubbing process. This ensures compliance to regulations and prevents cross-contamination between different substrates. An oil recycling unit is also included which allows for reuse of the DI water for extended periods of time. The waste management machine helps reduce the consumption of any hazardous or consumables used in scrubbing and polishing. Moreover, the machine has a user-friendly operation panel, allowing for simple and intuitive setup in a variety of manufacturing applications. Its adjustable motion tool and deflection sensing technology enable it to clean multiple types of substrates efficiently with minimal variations. The scrubbing head is also designed for precise configuration and can be easily changed or replaced according to requirements. Overall, DCS 141 is a reliable and efficient scrubber machine designed for various kinds of wafer and mask cleaning applications in the semiconductor industry. Its user-friendly operation, automated asset, and integrated waste management model make it an ideal choice for any precision wafer and mask cleaning processes.
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