Used DISCO DCS 141 #9312489 for sale

DISCO DCS 141 is a highly efficient and cost-effective wafer and mask scrubber for semiconductor production. It is a belt-type tool with innovative technologies, designed to provide an automated and precise cleaning of wafers, substrates, and window masks. DISCO DCS141 is equipped with a fine patterned conveyor belt for diffusion of atmospheric Ozone, offering consistent and reliable cleaning performance. It is driven by a DC servo motor and belt drive system to ensure precise and accurate processing. Additionally, its hydro-dynamically flows Ozone for optimized cleaning forces and removal rates. DCS 141 is ideally suited for large-scale production, since it is capable of processing up to 1,000 wafers per hour. It is suitable for use in wet and dry scrubbing process to achieve optimal cleaning. The wet scrubbing process is based on a technologically advanced and highly efficient flushing mechanism. This includes a shower unit, which comprises nozzles configured to produce a uniform and constant water flow across the wafer. The dry scrubbing process uses an atmospheric-based Ozone process, which is suitable for highly sensitive processes or those with shorter cycle times. In addition to wet and dry scrubbing, DCS141 also provides etching and vibratory cleaning capabilities. It is equipped with a high-performance pneumatic actuator, capable of reaching vibrational frequencies up to 55 Hz and providing powerful aggressiveness regardless of the surface type. Additionally, it has two separate etching chambers and two etching solutions for different applications. This enables the use of two types of etching techniques simultaneously, providing superior cleaning performance. DISCO DCS 141 is also equipped with an advanced software package, which offers a user-friendly touchscreen interface and workflow management system. It is able to detect, monitor, and report on errors with critical process parameters. Furthermore, it is also equipped with a parameter setting menu, built-in diagnostics, and an online support system. DISCO DCS141 is an advanced wafer and mask scrubber, offering high-end performance that is reliable, efficient, and cost-effective. Its automated cleaning capabilities, capable of processing up to 1,000 wafers per hour, make it suitable for large-scale production. Thanks to its innovative technologies, a user-friendly touchscreen interface, and advanced software package, it is able to provide excellent cleaning performance with a minimum of effort.