Used DISCO DCS 1460 #9395087 for sale
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DISCO DCS 1460 is a wafer and mask scrubber designed for use in semiconductor fabrication processes. It combines advanced technologies in an efficient and effective equipment which cleans wafers or masks with ultra-low water consumption, resulting in high productivity. The system features a highly reliable top and bottom spray device, wherein the nozzles on the top can spray cleaning fluid while the bottom nozzle circulates negative ion ionized cleaning solutions. This spraying technology ensures uniform cleaning over the entire wafer or mask surface. The unit also boasts a number of other features, including a flat surface cleaning plate, a wide wafer clamping environment, and a mask storage tank with a direct connection flow channel to the cleaning module. This enables the efficient removal of particles and organic residues, with minimal water consumption. It is important to note that DCS 1460 can also provide customized processing conditions for various equipment and substrates, further enhancing its cleaning capability. DISCO DCS 1460 is equipped with an intuitive control machine that allows for the easy operation and maintenance of the tool. It also provides useful features such as auto-generate maintenance reports, and interactive touchscreen control for easy operation. The asset is also equipped with a 3D color view display which provides ongoing monitoring of the model cleaning process. DCS 1460 is a reliable and efficient wafer and mask scrubber designed to clean substrates with a minimal level of water consumption. Its advanced features include a top and bottom spray device, a flat cleaning plate, a wide clamping environment, a storage tank with a direct connection flow channel, and an intuitive control equipment with a 3D color view display. With its user-friendly design and a range of customizable settings, DISCO DCS 1460 provides excellent cleaning efficiency and high productivity.
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