Used DMS M208 #9399898 for sale
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DMS M208 is a wafer and mask scrubber designed to automate the cleaning process of semiconductor fabrication. The scrubber is fitted with five integrated modules, including cassette-to-cassette transport, pre-saturation rinse, scrubbing, final cleaning and drying. This automated process removes organic contaminants from the front and backside of multiple etched components in one cycle. Cleaning begins with the cassette-to-cassette transport which takes the cassettes of etched components from the user and moves them to the pre-saturation rinse station. This station saturates the etched components with a liquid solution, usually a dilute solution of hydrogen peroxide or sodium hydroxide (NaOH). This solution is applied using a spray sprayer and is used to remove any residual particles from the etched components. The next station is the scrubbing station which is equipped with multiple scrub brushes and scrubbable plates. These scrub brushes are used to remove the organic contaminants from the etched components with the help of the scrubbable plates. This station also includes a low flow shower to ensure uniform scrubbing performance. After scrubbing, the components are transferred to the final cleaning station where they are subjected to chemical-free cleaning and final drying. This process removes any remaining organic contaminants or residual chemical particles. The scrubbed and cleaned components are then transferred to the drying station. Here, moisture is removed from the components and they are ready to be transferred to their respective cassettes for return to the user. M208 is a fully automated system that requires minimal operator interaction. It is capable of achieving up to 99% particle removal efficiency and is designed for a wide range of semiconductor fabrication needs. It reduces production downtime, increases yields and decreases contamination levels within the production process.
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