Used DNS / DAINIPPON SS-3000-AR #293617845 for sale
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ID: 293617845
Vintage: 2005
Scrubber, 12"
Chamber A:
Process: Wafer surface clean
Vacuum chuck
Soft spray N2 10~100NL/min
Rinse: DIW / CO2 Injection, resistivity <1 MΩ
Spin dry speed: 3000 RPM
Chamber B:
Process: Wafer surface clean
Vacuum chuck
Soft spray N2 10~100NL/min
Rinse: DIW / CO2 Injection, resistivity <1 MΩ
Spin dry speed: 3000 RPM
Chamber C:
Wafer backside clean
Mechanical chuck
PVA Burush
Rinse: DIW / CO2 Injection, resistivity <1 MΩ
2005 vintage.
DNS / DAINIPPON SS-3000-AR Wafer & Mask Scrubber is a reliable, high-efficiency cleaning equipment designed to remove particles from the surface of wafers and masks in semiconductor fabrication processes. The system utilizes advanced vibration-oscillation cleaning technology to scrub particles from the surfaces of wafers and masks quickly and efficiently. DNS SS-3000-AR includes two scrubbing chambers, each with a vibrating cleaning head. The scrubbing chambers can hold up to 3000mm2 of wafer & mask material. The scrubbing head is powered by a powerful motor, adjustable to three speeds, which vibrates the scrubbing head at high frequencies. The scrubbing head is capable of scrubbing both the surface and edges of wafer & mask material, removing particles from both the material's exterior and interior. The scrubbing head can adjust to three cleaning speed levels, allowing for efficient and thorough cleaning. The unit is equipped with pressure sensors to ensure appropriate scrubbing pressure during each cycle. The machine is also equipped with a high-tech particle detector, which can detect particles as small as 0.1μm on the surface of the material. DAINIPPON SS 3000 AR is built with a robust construction, designed to withstand extreme temperatures, dust, moisture, and shock. The tool also includes an effective environmental control asset to keep the environment of the scrubbing chambers clean and free of impurities. DNS SS 3000 AR has a user-friendly interface, with easy-to-understand, multi-language menus, allowing for quick and easy set-up and operation. Additionally, an external data logging model can be connected to the equipment, allowing for comprehensive process control and traceability. DAINIPPON SS-3000-AR Wafer & Mask Scrubber is an efficient and effective cleaning solution, designed to remove even the smallest particles from the surface of wafers and masks. The robust construction, precision pressure controls and powerful scrubbing head make it ideal for use in the semiconductor fabrication process, ensuring clean and reliable results.
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