Used DNS / DAINIPPON SS-3100 #293615354 for sale
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ID: 293615354
Vintage: 2009
Wet clean wafer scrubber
Index block
Main block
Power box
(4) Cymechs load ports
(2) Cable boxes
Sub panel
DVR Box
(2) Electric boxes
MHU / IHU KAWASAKI 639Y1429 / 1427
Missing pump IWAKI
Chamber / MHU / IHU PC Meiden UPIBOC-1
2009 vintage.
DNS / DAINIPPON SS-3100 Wafer & Mask Scrubber is a machine capable of scrubbing and cleaning various types of wafers and masks. The scrubber features an advanced cleaning system, with a decontamination treatment using ultrasonic waves, foaming water jets and spin various scrub heads. The machine's features a high velocity scrub behavior, metallic abrasion, tweezers, and rotary brushes to provide a safe, thorough, complete and consistent cleaning. The scrubber is equipped with a dual-axis rotary stage and a manual scrub head, both of which are capable of handling wafer sizes up to 8 inches in diameter. It is able to spin quickly and steadily for optimal washing and scrubbing action, and is powered by an AC servo motor with a high speed and precision. The scrubbing head is designed to move freely in the x- and y-axes, allowing it to scrub every corner of the wafers for thorough cleansing. DNS SS-3100 has an intuitive touch screen control, allowing for optimal washing and scrubbing with one-touch manual operation. The scrubber has a 6 liter water tank and four cleaning tanks, providing enough water capacity and longevity to fulfill various washing and scrubbing tasks. The innovatively designed scrub head ensures a consistent and effective cleaning performance in any shape of wafers or masks. The scrubber uses a unique air-knife system to reduce the water content of the wafers, ensuring that wafers and masks can be quickly dried and reused without time-consuming drying time. The scrubber also features a wide range of safety features, including temperature sensors and safety switches to prevent overheating, and an automatic empty soak tank system to prevent over-foaming and splashing. The scrubbing and cleaning process can be done quickly and efficiently, providing a quality product with the assurance of safety. DAINIPPON SS 3100 is the perfect tool for efficiently cleaning wafers and masks to a high specification.
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