Used DNS / DAINIPPON SSW-60A-AR #9409203 for sale
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ID: 9409203
Wafer Size: 6"
Vintage: 1998
Spin scrubber, 6"
Transfer robot
Loading position type: Left side
3-Colors signal tower
Non-SMIF
No GEM Controller
(2) Reverse units
Indexer unit:
(4) Cassette
Wafer defect sensor
Transfer robot (A type) X, Y and Z Axis
TR unit:
Dual arm transfer robot (Vacuum less) X1, X2, Y, Z and R Axis
Wafer defect sensor
Front-side spin unit 3:
Mechanical chuck type
Brush nozzle
Jet nozzle
DIW 1, DIW 2, Brush rinse, N2 Blow and N2 Purge
Front side unit 4:
Vacuum chuck
Bursh nozzle
Jet nozzle
DIW 1, DIW 2, Back rinse, D-Sonic rinse, Jet rinse, N2 Blow and N2 Purge
Spin motor missing
Side cabinet:
Jet pump
Megon cabinet
1998 vintage.
DNS / DAINIPPON SSW-60A-AR wafer and mask scrubber is a high-precision scrubber used for washing silicon wafers and cutting masks. DNS SSW60A-AR model is an upgrade from the SSW-60A model, featuring enhanced performance and improved operational efficiency. The machine has an advanced water jet cleaning equipment with dual-nozzle jet heads capable of adjusting the jet angle and intensity to effectively clean both wafers and masks. A high-speed wafer brush removes particles and contaminants from the wafers and masks, and the scrubber is capable of working with a variety of sizes, shapes, and materials. The scrubber features a 15-inch transparent and non-contact (TCNT) scintillator, which enables fast, accurate, and reliable detection and measurement of thin films and particles. The built-in high-resolution minilab system makes it possible to take detailed testing images of the wafers and masks, allowing for analysis and evaluation of their cleanliness. DAINIPPON SS-W60A-AR also has an advanced "CX" monitoring unit which lets the user adjust the cleanliness level, re-clean sets of wafers and masks, and monitor the cleaning process in real-time. The scrubber's operating machine can be programmed to automatically execute a variety of functions, including setting the cleaning parameters, determining if the cleaning process is successful, and automating the removal and storage of the cleaned wafers and masks. For added safety, the machine has a safety detection tool which automatically stops the scrubber if any abnormality is detected, and also features an air-shower asset that dramatically reduces dust contamination. SSW-60A-AR is also highly efficient, has short cycle time, and low power consumption. Overall, DNS / DAINIPPON SSW 60A-AR wafer and mask scrubber is a must-have for anyone looking for an advanced, cost-effective, and versatile machine to keep their silicon wafers and masks clean. With its superior performance, user-friendly interface, and wide range of functions, DAINIPPON SSW60A-AR scrubber is guaranteed to get the job done.
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