Used ENTEGRIS NU-J6101 #293594350 for sale

ID: 293594350
Wafer Size: 12"
Vintage: 2007
Cleaning system, 12" 2007 vintage.
ENTEGRIS NU-J6101 wafer and mask scrubber is a specialized cleaning equipment engineered by ENTEGRIS Inc. to process and clean sensitive semiconductor and photomask substrates. This tool utilizes multiple cleaning cycles, chemical treatments and advanced robotics for optimal cleaning results on a variety of media, including the most common materials used in the semiconductor and photomask industries. NU-J6101 wafer and mask scrubber utilizes a patented single-stage scrubbing solution providing a non-contact cleaning method to ensure substrate integrity. An advanced robotic arm is used to grab the substrate from a shelf, grip it and move it between robotic stations as needed. The robotic arm delivers an optimum cleaning process to each substrate which include a micro etch and deionized water rinse. During the micro etch, a combination of chemical agents, deionized water and ultrasonic energy is used to strip away buildup and contaminants. After the micro etch, the robotic arm rotates the substrate to the other arm that rinses the substrate with high purity deionized water to remove remaining contaminants. The wafer and mask scrubber also features an advanced monitoring system to continuously monitor and control the scrubbing process in real time. This unit can detect any anomalies, such as excessive vibration during transport, and automatically shut down the machine if necessary. Additionally, the scrubber's advanced computer control tool enables precise scrubbing pattern control, allowing users to program the asset for specific cleaning processes. The end result of this cleaning process is a perfectly clean wafer or photomask. This includes removal of any particles or contaminants, including those too small to be visible to the naked eye. As the end product is a perfectly cleaned substrate, this machine enables manufacturers to invest in high quality photomasks and semiconductors, which is essential for any project that requires sensitive digital data. ENTEGRIS NU-J6101 wafer and mask scrubber is an essential tool for any semiconductor or digital manufacturing process. The innovative scrubbing technologies and precise robotic control of this model ensure the highest quality wafers and photomasks, a necessity for any precision manufacturing task.
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