Used ENTEGRIS NU-J6101 #9383262 for sale

ENTEGRIS NU-J6101 Wafer & Mask Scrubber is a fully automated wafer and mask cleaning equipment designed to ensure the highest product quality and reduce particle contamination. NU-J6101 features a quiet, ergonomic design that easily fits into any cleanroom environment. The Wafer & Mask Scrubber utilizes two heads that are capable of cleaning one to two 5-inch or two 8-inch wafers or masks simultaneously. The scrubber is capable of an adjustable cleaning angle between 10° and 90° and velocity of up to 500 rpm. ENTEGRIS NU-J6101 includes a 7-inch touch screen that allows users to easily program and adjust cleaning parameters. The Wafer & Mask Scrubber provides the versatility of three cleaning modes such as scrubbing, scrubbing with liquid addition and emulsification, as well as a dedicated cleaning mode for IC chuck scrubbing. The advanced cleaning technology ensures perfectly clean wafers and masks even after multiple cleaning cycles. The Wafer & Mask Scrubber features a three-stage contamination separation design. A single drain pipe located at the bottom of the machine collects all scrubbed particles from the chamber, which are then sent to the built-in particle filter to be filtered from the process exit solution. The filtered particles are then collected and ready to be disposed. The intuitive user interface is designed to promote user safety by automatically prompted for the correct cleaning parameters for the designated cleaning process. NU-J6101 is capable of both a 500 mL and 1000 mL cleaning solution tank and is equipped with a HEPA filtration system. The HEPA filtration unit helps to maintain a superior cleanroom environment as it captures any airborne particles that may enter the machine. The Wafer & Mask Scrubber is also equipped with an automatic lid safety interlock mechanism, which prevents any accidental opening of the machine lid. ENTEGRIS NU-J6101 Wafer & Mask Scrubber is an innovative and efficient cleaning tool that is specifically designed to exceed the demands of the semiconductor industry. It offers exceptional product quality, reliable cleaning performance, and a safe and ergonomic user experience. The advanced features and technologies provide users with the highest level of cleanliness and ultimate usability.