Used KOCAT KC-601 #9314417 for sale
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ID: 9314417
Wet scrubber for ICP
Capacity: 500 SLM
Interlock: flow sensor, level sensor
Processing gas: HCl, HF, Cl2, BCl3, SiH2Cl2, HBr, POCl3, NH3
Processing efficiency : >99%
Power: AC220V, max 5KW, normal 3KW
N2: 4-7kg/cm2
CW: 2-5kg/cm2, 2-5L/min, NPT 1/2"
Overflow drain: Acid drain, 2-5L/min, NPT 2"
Maintenance Drain: NPT 1/2"
Gas inlet: 3 port, NW50
(3) Process exhaust : -50--100mmH2O, 2m3/min
Dimension(W×D×H): 710×220×1650 mm
Weight: 350 kg
2011 vintage.
The KOAT KOCAT KC-601 Wafer and Mask Scrubber is a compact, easy to use machine that is designed to provide continuous, high-performance waterjet cleaning for silicon wafer and mask scrubbing. The unit features a patented jet design that provides maximum control and accuracy, which helps to ensure optimal cleanliness. The user-friendly, one-button operation allows the user to easily switch between working modes, allowing for quick and easy cleaning of both wet and dry substrates. The KOAT KC-601 is equipped with a high-pressure triple-pump ensuring your scrubbing process is both efficient and uniform. Its stainless steel body and automated operation make the machine able to maintain its condition and cleanliness in even the most demanding of environments. The adjustable nozzle is optimized for easy pointing and controlling the spraying direction. This ensures precision and reduces unintentional liquid splatter for clean operation. In addition, the KOAT KOCAT KC-601 is also equipped with a silicon dioxide filter. This filtration equipment is designed to capture and remove microscopic particles to ensure that any remaining residue is effectively eliminated. As a result, the cleaning performance of the machine is enhanced, resulting in a superior finish. The KOAT KC-601 is manufactured with a system of advanced safety features, making it safe and secure to use. A pressure control unit regulates the pressure of the waterjet, while a safety sealing machine prevents the possibility of water infiltration. Additionally, a built-in visual display provides both operational and a visual indication of the scrubbing process. Overall, the KOAT KOCAT KC-601 provides a powerful, user-friendly scrubbing solution. The efficient and reliable operations make it an ideal choice for any wafer and mask scrubbing process. With its cutting-edge blend of performance, precision, and safety, the KOAT KC-601 is the perfect choice for anyone looking for a superior quality scrubber.
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