Used KOCAT KSI-701 #9314418 for sale

Manufacturer
KOCAT
Model
KSI-701
ID: 9314418
Wet scrubber for ICP Capacity: 500 SLM Interlock: flow sensor, level sensor Processing gas: HCl, HF, Cl2, BCl3, SiH2Cl2, HBr, POCl3, NH3 Processing efficiency : >99% Power: AC220V, max 5KW, normal 3KW N2: 4-7kg/cm2 CW: 2-5kg/cm2, 2-5L/min, NPT 1/2" Overflow drain: Acid drain, 2-5L/min, NPT 2" Maintenance Drain: NPT 1/2" Gas inlet: 3 port, NW50 (3) Process exhaust : -50--100mmH2O, 2m3/min Dimension(W×D×H): 710×220×1650 mm Weight: 350 kg 2011 vintage.
KOCAT KSI-701 is a high-end, heavy-duty wafer and mask scrubber manufactured by KOCAT Corporation. It is designed for use in semiconductor assembly and processing applications, making it ideal for the needs of large-scale production lines. KOCAT KSI 701 offers superior performance and ease of use, with a wide range of cleaning, scrubbing, and polishing functions. Its primary purpose is to help in the process of cleaning and restoring the surfaces of wafers and masks used in various back-end production processes. It is capable of scrubbing both sides of the wafer or mask independently, allowing for mass production jobs to be quickly and effectively scrubbed. KSI-701 is also able to reduce contamination and other build-up on the surfaces of the parts by using that is highly effective and efficient. KSI 701 is a fully automated machine that is capable of cleaning, scrubbing, and polishing wafers and masks to a high standard of quality. This is achieved by the range of integrated functions, such as an X-Y scrubbing table, a linear VPI scrubbing system, and an oscillating scrubbing system. Its advanced wafer-handler also adds to its cleaning capabilities, as the machine can handle wafers of up to 25mm in diameter with ease. In terms of safety and maintenance, KOCAT KSI-701 has various protective features, such as a lid interlock, a gas shut-off function, and an automatic water shut-off function. This ensures safe operation and helps reduce the need for manual maintenance. It also has a range of alarms and sensors, which enable it to detect any irregularities in its operations in order to protect the parts being scrubbed from damage. KOCAT KSI 701 is an innovative product designed for both small and large-scale semiconductor production applications, offering a wide array of cleaning, scrubbing, and polishing functions. It is reliable, efficient, and easy to use, making it ideal for the demands of both high-end and entry-level production lines. Moreover, its advanced safety and monitoring features ensure that quality and safety are never compromised for speed.
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