Used LAM RESEARCH 2300 Coronus #293665044 for sale

LAM RESEARCH 2300 Coronus is a wafer and mask scrubber that provides advanced cleaning control for semiconductor device fabrication. 2300 Coronus is designed to effectively remove contaminants while maintaining precise control of the scrubbing process. The scrubber utilizes a combination of vacuum, cleaning solution, and ultrasonic technology to efficiently remove particles and impurities from wafers and masks. The cleaning process is monitored by a controller with a real time graphical display that shows current and historic wafer and mask cleaning parameters. The scrubber is equipped with a cantilever-mounted scrubbing head that is adjustable for optimum scrubbing efficiency. This scrubbing head is designed to provide greater cleaning coverage while minimizing wafer edge damage. The scrubbing head is also adjustable for cleaning particle size, scrubbing pressure, and reciprocating motion. The scrubber utilizes a three-zone scrubbing equipment that includes an evaporative dry area, a clean-room transfer area, and a wash zone. In the evaporative dry zone, the wafer is swept by air jets and simultaneously scrubbed by an ultrasonic-vibratory action for maximum chip profile cleanliness. The clean-room transfer area buffers vaporized particles and prevents them from re-settling on the wafer during transfer, while the wash zone uses a gentle scrubbing action to effectively remove debris. In addition to the three-zone scrubbing system, LAM RESEARCH 2300 Coronus also features a fluid delivery unit. This machine is designed to apply the appropriate amount and type of cleaning chemistry to the wafer. The tool is capable of applying various chemistries, such as HFE, IPA, and DI Water, while accurately monitoring and controlling the cleaning parameters to ensure optimal cleaning results. 2300 Coronus is designed for high throughput operations and provides a wide range of process control options. It is equipped with an advanced software package that supports user-programmable recipes and logging. The software also has built-in safety features such as wafer and mask tracking, alarm notifications, and automatic shut-off. LAM RESEARCH 2300 Coronus is an efficient and reliable tool for precise and effective wafer and mask scrubbing.