Used LAM RESEARCH 2300 Coronus #293668768 for sale

LAM RESEARCH 2300 Coronus is a wafer and mask scrubber designed for high-tech semiconductor processes. The scrubber uses a proprietary system made up of sophisticated ion source arrays to deliver high-precision cleaning and advanced plasma source technology to maximize scrubbing and cleaning power. The Coronus is designed for a variety of applications, including use in both wet and dry scrubbing, mask cleaning, wafer scrubbing, and plasma ashing. The Coronus is composed of a few main components. It has an ion source array, power supply, vacuum pump, and a robotic arm that moves the tool over the substrate surface. The ion source array provides intense plasma cleaning of extremely small particulate matter and can be tuned to different wavelengths and energies depending on the application. The power supply controls the intensity of the plasma to ensure precise cleaning while the vacuum pump maintains internal cleanliness of the tool and the substrate. The robotic arm allows for automated scrubbing that takes the processing of the wafer or mask to a single point of operation. The Coronus' advanced plasma cleaning system can process substrates up to 12 inches in size, with a cleaning speed up to three times faster than manual scrubbing. The tool is also designed to support wafer substrates of all shapes, sizes, and compositions. The Coronus' robust design and advanced electronics allow it to efficiently clean even the most challenging surfaces. The Coronus is extremely energy-efficient and has an environmentally-friendly design that limits the emission of unwanted gases while maintaining high performance and low maintenance. The unit's modular design and open architecture make it easy to maintain and upgrade. Additionally, because the Coronus is compatible with a wide range of automation and process monitoring systems, it is able to quickly integrate into existing semiconductor production lines. Overall, 2300 Coronus is a reliable and efficient wafer and mask scrubber specifically designed for use in semiconductor production. It combines advanced plasma technology and automation to deliver precise cleaning and high-performance results. The Coronus' modular design and flexible architecture make it a highly capable tool capable of meeting a variety of needs.