Used LAM RESEARCH DSS 200 #293595365 for sale

ID: 293595365
Vintage: 1993
Scrubber 1993 vintage.
LAM RESEARCH DSS 200 Wafer and Mask Scrubber is a high-precision tool that is used to clean wafers and masks from contamination. LAM RESEARCH ONTRAK DSS 200 provides contamination-free operation and is designed for cleanroom use. It is constructed of stainless steel for long life and superior corrosion resistance. DSS 200 features a two-step scrubbing process utilizing a combination of a rotating brush and a removable/replaceable degassing paddle. This two-step process removes particles, salt residue, and other contaminants from wafers and masks while protecting their surfaces. The scrubber also includes a high-flow filtration equipment that helps to ensure consistent results. ONTRAK DSS 200 offers a wide range of scrubbing parameters to suit a variety of production requirements. It has a temperature range of 20°C to 40°C, with a temperature accuracy of +/-1°C, as well as a variable scrub brush speed of up to 800 RPM. Pressure and visibility sensors can detect when wafers or masks are present and make adjustments accordingly. An acoustic-sensing system protects against residual overscrubbing, ensuring consistent results. The scrubber has a width of 33 inches and a height of 51 inches, making it a large and formidable device in a cleanroom setting. LAM RESEARCH DSS 200 has a total weight of 690 lbs and runs on a single three-phase power source. It has an 8-ft exhaust stack outlet designed for air volume of up to 650 cubic feet per minute. The scrubber also has a direct-drive force motor for greater control. LAM RESEARCH ONTRAK DSS 200 features a variety of safety features as well. An illuminated interlock unit ensures operator safety, and the built-in filter machine will protect the scrubber in case of a power failure. The scrubber also includes an advanced diagnostics tool that offers unprecedented performance insight. DSS 200 Wafer and Mask Scrubber is an ideal choice for the cleanroom environment. It is designed to provide reliable and consistent performance, and its advanced safety features are an added bonus. For a superior scrubbing experience, ONTRAK DSS 200 is the ideal solution.
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