Used LAM RESEARCH DSS 200 #9094834 for sale

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ID: 9094834
Wafer Size: 5", 6" & 8"
Vintage: 1998
Double-sided, post-CMP scrubber, 5", 6" & 8" (5) Pressurized chemical distribution vessels 110V, 1 Phase, 60Hz 1998 vintage.
LAM RESEARCH DSS 200 is a wafer and mask scrubbing equipment designed for use in semiconductor and metrology processes in the manufacture of components such as integrated circuits. It is a manual process that uses a combination of mild alkaline cleaners, surfactants, and air to clean and remove all types of fine particulate contaminants from wafers and masks. LAM RESEARCH ONTRAK DSS 200 system features a two-stage cleaning cycle, starting with an imaging score pre-cleaning stage to remove persistent particulates, such as surplus exposure materials, from the surface of the wafers and masks. This is followed by a final manual cleaning stage, where the wafer and mask surface is meticulously scrubbed and wiped with a selection of solvents and cleaning solutions. This process is used to remove any fine particles, dirt, dust, and oil that may have been left behind after the pre-cleaning stage. A purge of clean dry air is then used to complete the cleaning cycle and dry the wafers and masks ready for the next processing stage. The unit is designed for use in industry settings and integrates with standard semiconductor and metrology equipment, making it easy to fit into existing processes. It is robust and reliable, and features a high safety rating of NEMA 12, making it suitable for use in hazardous conditions including areas with potentially flammable materials being used. DSS 200 has been designed to be compact, easy to operate, and requires minimal operator training. It is equipped with several features that increase process efficiency and accuracy, such as the QuickClear Software, which allows for quick changeover and reset of the machine between batches, and the Masked Area Monitor, which is used for automatic detection of unexposed areas on masks, increasing accuracy and reducing errors associated with manual scrubbing. The tool also features a range of easy to use safety features, including a safety door interlock asset to prevent accidental operation during cleaning cycles, as well as a fume hood to contain any hazardous materials used during the process. In conclusion, ONTRAK DSS 200 model is a reliable, robust, and efficient wafer and mask scrubbing equipment designed for use in industry settings. It is ideal for removing fine particulate contaminants from wafers and masks, and features a range of productivity and safety features that make it easy to use and operate.
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