Used LAM RESEARCH DSS 200 #9289905 for sale

ID: 9289905
Wafer Size: 8"
Vintage: 1996
Double sided wafer cleaner, 8" PRI AUTOMATION Package Wafer flow: Left to right Power: 120 V 1996 vintage.
LAM RESEARCH DSS 200 is a wafer and mask scrubber used for post-etch clean and pre-coat application. It features a sleek, ergonomic design and is designed to increase scrubbing efficiency. LAM RESEARCH ONTRAK DSS 200 uses a unique two-chamber equipment that utilizes two independent scrubbing heads to provide a uniform cleaning profile, while a variety of different brush heads and abrasive materials allow for the selection of the best scrubbing medium and technique for any given application. DSS 200 is built for performance and reliability. Its heavy-duty construction ensures a long life and produces superior surface cleaning quality. Its compact design makes ONTRAK DSS 200 easy to integrate into lab, cleanroom, or semiconductor production environments. An advanced scrubbing controller is equipped with a closed-loop brush speed control system and segmentation profile, enabling effective scrubbing solutions for each application. A detachable, adjustable hand wand ensures that manual scrubbing applications can be completed with ease. LAM RESEARCH DSS 200 provides a clean-scrubbed surface with extreme uniformity and outstanding residue removality, allowing for superior post-etch cleaning quality and pre-coat substrate preparation results. The scrub processes of the scrubber can reduce particle and metal contaminants, effectively eliminating defects present on the substrate. The spray unit creates an evenly distributed cleaning solution during the scrubbing process, ensuring no dry areas are left behind. LAM RESEARCH ONTRAK DSS 200 also features a reliable, easy-to-use cleaning agent control machine that tracks the chemistry of all cleaning agents used. It can be used with both single- and multi-step processes. Its reliable spray tool will give superb wash zone coverage, ensuring a consistent, uniform surface finish. Additional features include LED lighting to monitor wafers and masks the entire time, allowing for optimized scrubbing with minimal downtime. Overall, DSS 200 is an economical, high-performance scrubber that has been designed to deliver outstanding substrate cleaning results in tight spaces. Its advanced controller asset helps to ensure a reliable and efficient scrubbing process, while the easy-to-use cleaning agent control model helps to maximize through-put efficiencies and yields. ONTRAK DSS 200 is the perfect solution for post-etch clean and pre-coat application needs.
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