Used LAM RESEARCH DSS 200 #9390058 for sale

LAM RESEARCH DSS 200 is an advanced wafer and mask scrubber used for cleaning and scrubbing any semiconductor wafer and photomask surface. This scrubber uses a variety of cleaning techniques designed to ensure thorough cleaning while avoiding damage to the sensitive wafer and photomask layers. LAM RESEARCH ONTRAK DSS 200 operates by using a combination of ultra-high speed scrubbing and Er:YAG laser cleaning. During scrubbing, an array of scrubbing heads controlled by precision motorized arm assemblies move across the surface of the wafer and photomask at rated velocities of up to 18m/sec, or 60,000 scrub strokes per minute. This scrubbing action is achieved through the use of three counter-rotating brushes made from high-durometer polymeric bristles. Each brush is individually controlled and uniquely programmed for pressure, angle, and speed to ensure that the surface of the wafer or photomask is evenly cleaned. The Er:YAG laser is also used to clean wafer and photomask surfaces. The laser can remove small particles and contaminants that can attach to the surface of wafers and photomasks during processing. The laser is delivered to the wafer or photomask surface by a focused beam of light that is precisely controlled by an internal light-directed system. This removes any particles that remain on the surface after the scrubbing process is complete. DSS 200 can be used to clean a wide variety of semiconductor wafers and photomasks, including low-k, SOI, and substrate films. The scrubber is fully automated, and its control logic can be tailored to the specific needs of the user. In addition, the scrubber uses all industry standard connection protocols, including serial, Ethernet, and SCSI. ONTRAK DSS 200 wafer and mask scrubber is an advanced tool designed to provide the highest level of wafer and photomask cleaning available. Its combination of scrubbing and laser cleaning allows it to remove even the most stubborn contaminants while avoiding damage to sensitive device layers. LAM RESEARCH DSS 200 is an essential tool for semiconductor manufacturers who need precise and reliable cleaning of their wafer and photomask surfaces.