Used LAM RESEARCH / ONTRAK DSS 200 Series 2 #293605205 for sale
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LAM RESEARCH / ONTRAK DSS 200 Series 2 Wafer and Mask Scrubber is designed to enable wafer and photomask cleaning. It utilizes a specially designed scrubbing method that provides efficient, high-quality cleaning with exceptional repeatability of results. The scrubber is capable of cleaning a range of materials such as resist residue, field oxide and inorganic particles from substrates such as silicon, quartz or low-k dielectric substrates. ONTRAK DSS 200 Series 2 is a fully automated wafer and photomask scrubber that delivers superb cleaning performance. The scrubber is capable of cleaning both six and twelve inch wafers as well as twelve inch photomasks. It utilizes a patented technology known as DSS (Dynamic Scrubbing Equipment) to provide a consistent, high quality clean with repeatable results. This system uses two pairs of closely spaced linear actuators that move the wafer and photomask across a scrubbing surface at exact, pre-set speeds and forces. This provides very precise, repeatable cleaning results. The scrubber utilizes a precision, high capacity liquid delivery unit which ensures consistent and effective cleaning. This machine allows the user to precisely control the quantity of cleaning fluid, pressure, and scrubbing force for optimal results. LAM RESEARCH DSS 200 Series 2 also incorporates an intuitive control tool and a user-friendly graphical interface that allows for easy setup, programming and operation. The scrubber also features an advanced cooling asset that helps protect sensitive substrates from thermal damage. In addition, the scrubber is equipped with a leak detection model and a waste collection equipment that ensure that the scrubber operates in a safe and environmentally friendly manner. Overall, DSS 200 Series 2 Wafer and Mask Scrubber is an excellent choice for the industrial and research sectors. It provides efficient, repeatable, high quality cleaning with minimal thermal damage. The fully automated design combined with the intuitive control system and user-friendly graphical interface makes this scrubber easy to use and maintain. As such, it is an excellent choice for a wide range of applications.
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