Used LAM RESEARCH DSS 200 #293595364 for sale

LAM RESEARCH DSS 200 Wafer & Mask Scrubber is a state-of-the-art equipment designed to clean thin-film etch residue in the semiconductor fabrication process. The system is designed to use low-abrasive techniques to safely scrub and restore a variety of substrates, such as silicon wafers, dielectric film, and metallic masks. LAM RESEARCH ONTRAK DSS 200 consists of two main units; a base unit and a scrubber unit. The base unit is an open-frame structure featuring an ergonomic platform for ergonomically-friendly operation; adjustable gauge control; and a stainless steel wash tub for precise liquid delivery. The scrubber unit includes all of the necessary tools and cleaning components, including a rotatable wafer platform, two scrub pads and two spring-loaded cleaning fingers, for precise and efficient cleaning. DSS 200 is also equipped with a temperature, humidity, and pressure control unit, which helps ensure the optimal conditions for effective scrubbing. In addition, the machine is designed with a variety of safety features, such as a safe-handle grip and an automatic shut-off tool, to help ensure a safe operation. The asset offers a variety of advanced technologies to ensure the highest levels of cleanliness. One of the most significant advancements is the Active Jet Purge™, which provides efficient scrubbing with zero abrasive media to ensure the highest levels of cleanliness. Other advanced technologies including Thermal Imaging, Extended Scrub Technology, and Auto-Detect Rotation™ help ensure that the correct scrubbing parameters are applied for each substrate. In addition to the scrubbing capabilities, ONTRAK DSS 200 offers advanced statistical process control, allowing operators to track and analyze scrubbing performance and cleanliness results. The model also includes several convenience features, such as auto-start and auto-stop modes, multiple tool loading and unloading, and particle count monitoring. As a result, LAM RESEARCH DSS 200 provides an effective solution for thin-film etch residue removal, making it an ideal choice for quality and process control in semiconductor fabrication. The combination of its active cleaning technologies and advanced statistical process control capabilities make LAM RESEARCH ONTRAK DSS 200 a powerful and efficient scrubbing equipment, ensuring quality and reliable results.