Used LAM RESEARCH / ONTRAK Synergy #9384775 for sale

LAM RESEARCH / ONTRAK Synergy
ID: 9384775
System.
LAM RESEARCH / ONTRAK Synergy is a leading-edge wafer and mask scrubber designed to provide high quality, precise scrubbing solutions for semiconductor production applications. This system combines advanced technologies from both ONTRAK and LAM RESEARCH to maximize efficiency and effectiveness. The scrubber utilizes a two-axis robot arm with a fine-pitch actuator equipped with a low-pressure, low-flow, programmable, brush-head spray system designed to provide optimal scrubbing results with minimal material usage. The robot takes on the entire workload, allowing for consistent, uniform scrubbing of the wafer surface. This solution also utilizes an electrostatically-charged, filtered, electronically heated dryer with active particle capture filters. This ensures that the wafer is dried quickly and completely with no residue left behind. The scrubber is designed for maximum flexibility and will accommodate most existing wafer diameters up to 300 mm and mask sizes up to 220 mm. It is also capable of cleaning up to 8 wafers and 4 masks simultaneously in a single run. Its design also ensures a remarkably high scrubbing throughput of up to 6,000 wafers/hour. ONTRAK Synergy scrubber brings both convenience and accuracy to the semiconductor production process with its highly customizable automated process flow designed to meet specific production requirements. Advanced features allow for multiple configurations such as high scrubbing/dryer cycles, cleaning nozzles that can be adjusted for various surface geometries, computer-controlled intervention points, and much more. The scrubber is designed to meet the highest standards of automated equipment design, driven by application-specific requirements. It is capable of lasting over 20 million parts per year before requiring any preventive maintenance. This is ensured by the use of advanced safety features such as redundant sensors, interlocks, and automated error detection and recovery algorithms. LAM RESEARCH Synergy scrubber's dedication to providing cost-effective, efficient solutions is evident throughout its design. Its low operating and maintenance costs, combined with its flexibility and advanced automated cleaning process, make it one of the best choices for production-grade scrubbing solutions.
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