Used MTI MULTIFAB #97291 for sale
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ID: 97291
Wafer Size: 6"
Coater
Set up for 6" wafers with cassette to cassette transfer using robotic handler
Side dispense for liquid HMDS dispense
Tritec resist dispense
Coat bowl
Pneumatic hot plate, second hot plate available at additional cost
Spare parts package included ($5,000 value)
Additional dispense such as backside EBR, backside wash, top side EBR or bowl wash are available.
MTI MULTIFAB is a highly efficient and effective wafer and mask scrubber solution. This scrubber is designed to help with the removal of residual particles and impurities that might have been caught during the manufacturing process of electronic chips. MULTIFAB is a tool that is used in the semiconductor industry to churn out chips that are of the highest quality and reliable performance. The scrubber works by using a viable combination of water, solvents, and air-flow. As soon as the wafers and/or masks are placed in the scrubber, the cleaning process begins. Water and/or solvents are dispensed in order to help dissolve the particles and impurities that may have been caught during the manufacturing process. Once the particles and impurities have been dissolved, a powerful air-flow is used to help the scrubbed away from the wafers and/or masks. In order to ensure effective and consistent results, the scrubber offers a programmable cycle layout which allows for a tailored cleaning of the wafer and/or masks according to the type of materials and particles present. The scrubber features an effective conveyor system to move the wafers and/or masks during the cleaning process. This conveyor system helps to minimize the risk of manual handling of the wafers and/or masks, thus ensuring that they are not further contaminated during their transit. The scrubber is also equipped with multiple scrubbing nozzles, which are placed in different angles, to ensure the optimal and effective thorough scrubbing. MTI MULTIFAB is also equipped with several usage enhancing features. This includes comprehensive recipe settings, in-process sensing technologies, adjustable parameters, combined scrubbing functions and data logging capabilities. This ensures that the scrubber can be tuned to the specific requirements of certain wafers/masks while also logging the data of its usage. MULTIFAB is a highly efficient and reliable scrubber solution for the removal of particles and impurities from wafers and masks. The combination of water, solvents, and air-flow coupled with the adjustable parameters, conveyor system, and data logging capabilities works together to ensure that the highest quality chips are produced.
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