Used MTI MULTIFAB #97293 for sale
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ID: 97293
Wafer Size: 6"
Developer
Set up for 6" wafers with cassette to cassette transfer using robotic handler
Develop bowl
Pneumatic hot plate, second hot plate available at additional cost
Develop module can be set up with puddle dispense or fan spray dispense
Develop module will be set up with one side dispense for DI water
Spare parts package included ($5,000 value)
Additional dispense such as backside EBR, backside wash, top side EBR or bowl wash are available.
MTI MULTIFAB is a wafer and mask scrubber that provides effective, consistent and repeatable cleaning of wafers and masks. It utilizes a combination of electrochemical processes, ultra-pure water scrubbing, and vapor phase scrubbing to safely and quickly remove surface particles, contamination, and residues. MULTIFAB is specifically designed to deliver maximum cleaning performance without damaging sensitive surfaces. By combining several cleaning technologies, MTI MULTIFAB is the most versatile and robust scrubbing system on the market. MULTIFAB is designed to effectively clean a variety of surfaces, such as silicon dioxide, silicon nitride, glass, or metal. It also will clean a variety of contaminants, such as photoresists, etch residues, and particle. It is designed to remove residues that are either organic or inorganic. The electrochemical processes employed by MTI MULTIFAB involve passing energized ions through a solution to attract and break down chemical bonds on the substrate or mask surfaces. This effectively removes surface particles, contaminants, and residues. The combination of scrubbing and chemical processes ensures effective, consistent, and repeatable cleaning performance. In addition to the electrochemical processes, MULTIFAB also utilizes an ultra-pure water scrubbing process. It uses ultra-pure water to loosen particles on the substrate or mask surfaces. This process leaves them vulnerable to the electrochemical processes and quickly removes the contaminants from the surfaces. MTI MULTIFAB also utilizes an advanced vapor phase scrubbing process to effectively clean substrates and masks. This process utilizes a fine mist of ultra-pure water is sprayed onto the surface in order to penetrate deep within the surface and disrupt any contaminant or residue particles. The advanced recycling technology allows for continuous cleaning of wafers and masks over extended periods of time. MULTIFAB is designed to keep operational costs low while maintaining high-quality results. It utilizes high-capacity fluid tanks, allowing for extended scrubbing cycles while also allowing for cost-effective operation. It also features an advanced user interface that allows for operation and maintenance to be performed quickly and easily. MTI MULTIFAB provides reliable and efficient cleaning for a variety of wafer and mask materials. Its combination of processes, advanced fluid tanks, and user interface ensures a cost-effective solution that can clean substrates and masks quickly and efficiently. It is the most versatile and robust scrubbing system on the market.
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