Used SAWA SC A22 #9157623 for sale

SAWA SC A22 is an automated wafer and mask scrubber designed to rapidly remove particles and adhesive residue from flat surfaces such as wafers and masks with minimal abrasion. This scrubber can be used to clean photomasks, bare silicon wafers, and abrasive wafers during the production process. It is also used to prepare substrates for post-production handling such as plating, wet cleaning, or bonding. SC A22 is equipped with a range of brushing and vacuum technologies to increase cleaning efficiency, reduce particle generation, and enhance surface preparation. SAWA SC A22 utilizes a powerful dual-brush equipment, including brush pads with soft, medium, and hard bristles that oscillate at high frequency to agitate and suspend particles away from the wafer and photomask surfaces. This dual-brush system is integrated with a highly efficient vacuum unit to ensure effective particle removal, while still preventing particle re-deposition. An air knife is also integrated to facilitate rinsing and blow-off of debris. The scrubber can accommodate four wafers and four masks per cycle. The substrate fixtures lock into a translating drive machine, which moves the scrubbing arms between the substrate fixtures and the scrubbing head. The scrubbing head can be adjusted to allow for precise control of the brushing and vacuum functions. This allows for a wide range of process parameters to be optimized depending on the specific application. A built-in pressure sensor also ensures that the scrubbing pressure is within pre-programmed settings. SC A22 is equipped with a control tool that is user friendly, and includes monitoring, programming, diagnostics, and OEE (overall equipment efficiency) capabilities. The control asset features a 12.1-inch LCD touchscreen with built-in remote access for long-distance operation. The machine can also be programed to automatically run at start up, and stored cleaning recipes can be added and edited for repeat runs. The built-in Operator Model Alarm notifies the operator of any irregular conditions. SAWA SC A22 is an ideal scrubber for a wide range of semiconductor applications. This machine is dependable, repeatable, and easy to operate and maintain. As a result, this scrubber is well suited for use in production lines requiring high levels of process control and line stabilization.